Abstract
There is a significant difference in the lattice parameters of GaN and AlN and for many device applications AlxGa1-xN substrates would be preferable to either GaN or AlN. We have studied the growth of free-standing zinc-blende and wurtzite AlxGa1-xN bulk crystals by plasma-assisted molecular beam epitaxy (PA-MBE). Thick (similar to 10 mu m) zinc-blende and wurtzite AlxGa1-xN films were grown by PA-MBE on 2-in. GaAs (0 0 1) and GaAs (1 1 1)B substrates respectively and were removed from the GaAs substrate after the growth. We demonstrate that free-standing zinc-blende and wurtzite AlxGa1-xN wafers can be achieved by PA-MBE for a wide range of Al compositions. (C) 2011 Elsevier B.V. All rights reserved.
Original language | English |
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Pages (from-to) | 80-84 |
Number of pages | 5 |
Journal | Journal of Crystal Growth |
Volume | 350 |
Issue number | 1 |
DOIs | |
Publication status | Published - 1 Jul 2012 |
Keywords
- zinc-blende
- AlxGa1-xN
- wurtzite
- bulk crystals
- molecular beam epitaxy
- substrates
- semiconducting III-V materials
- nitrides