Twin-bladed microelectro mechanical systems variable optical attenuator

Research output: Contribution to journalArticle

4 Citations (Scopus)

Abstract

The design and evaluation of a microelectro mechanical systems (MEMS) based variable optical attenuator is reported. The device contains two blades, which are each driven by a separate electrostatic comb microactuator, and move independently to form a variable slit. This device has been fabricated in silicon-on-insulator material which has been back-etched. Electro-mechanical design considerations, including factors to minimise the side instability of the comb drive, are described. Finite element modelling (FEM) of the variable optical attenuator (VOA) is backed up by theoretical results, and the results from the theoretical work verify the findings from the FEM. Optical modelling of the VOA using near field diffraction theory is also reported. Experimentally, the device was driven from 0-34V DC to measure its static characteristics. For dynamic characterisation, the device was operated from 0-28 V AC and its fundamental resonant frequency was measured to be 3 kHz. Optical measurements including wavelength dependent attenuation are also presented.
LanguageEnglish
Pages93-100
Number of pages7
JournalOptical Review
Volume13
Issue number2
DOIs
Publication statusPublished - 2006

Fingerprint

attenuators
static characteristics
blades
optical measurement
slits
resonant frequencies
alternating current
near fields
attenuation
direct current
insulators
electrostatics
evaluation
silicon
diffraction
wavelengths

Keywords

  • optical method
  • experimental study
  • finite element method
  • microactuators
  • microelectromechanical device
  • optical attenuator
  • electromagnetic wave diffraction

Cite this

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title = "Twin-bladed microelectro mechanical systems variable optical attenuator",
abstract = "The design and evaluation of a microelectro mechanical systems (MEMS) based variable optical attenuator is reported. The device contains two blades, which are each driven by a separate electrostatic comb microactuator, and move independently to form a variable slit. This device has been fabricated in silicon-on-insulator material which has been back-etched. Electro-mechanical design considerations, including factors to minimise the side instability of the comb drive, are described. Finite element modelling (FEM) of the variable optical attenuator (VOA) is backed up by theoretical results, and the results from the theoretical work verify the findings from the FEM. Optical modelling of the VOA using near field diffraction theory is also reported. Experimentally, the device was driven from 0-34V DC to measure its static characteristics. For dynamic characterisation, the device was operated from 0-28 V AC and its fundamental resonant frequency was measured to be 3 kHz. Optical measurements including wavelength dependent attenuation are also presented.",
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Twin-bladed microelectro mechanical systems variable optical attenuator. / Li, L.; Uttamchandani, D.G.

In: Optical Review, Vol. 13, No. 2, 2006, p. 93-100.

Research output: Contribution to journalArticle

TY - JOUR

T1 - Twin-bladed microelectro mechanical systems variable optical attenuator

AU - Li, L.

AU - Uttamchandani, D.G.

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N2 - The design and evaluation of a microelectro mechanical systems (MEMS) based variable optical attenuator is reported. The device contains two blades, which are each driven by a separate electrostatic comb microactuator, and move independently to form a variable slit. This device has been fabricated in silicon-on-insulator material which has been back-etched. Electro-mechanical design considerations, including factors to minimise the side instability of the comb drive, are described. Finite element modelling (FEM) of the variable optical attenuator (VOA) is backed up by theoretical results, and the results from the theoretical work verify the findings from the FEM. Optical modelling of the VOA using near field diffraction theory is also reported. Experimentally, the device was driven from 0-34V DC to measure its static characteristics. For dynamic characterisation, the device was operated from 0-28 V AC and its fundamental resonant frequency was measured to be 3 kHz. Optical measurements including wavelength dependent attenuation are also presented.

AB - The design and evaluation of a microelectro mechanical systems (MEMS) based variable optical attenuator is reported. The device contains two blades, which are each driven by a separate electrostatic comb microactuator, and move independently to form a variable slit. This device has been fabricated in silicon-on-insulator material which has been back-etched. Electro-mechanical design considerations, including factors to minimise the side instability of the comb drive, are described. Finite element modelling (FEM) of the variable optical attenuator (VOA) is backed up by theoretical results, and the results from the theoretical work verify the findings from the FEM. Optical modelling of the VOA using near field diffraction theory is also reported. Experimentally, the device was driven from 0-34V DC to measure its static characteristics. For dynamic characterisation, the device was operated from 0-28 V AC and its fundamental resonant frequency was measured to be 3 kHz. Optical measurements including wavelength dependent attenuation are also presented.

KW - optical method

KW - experimental study

KW - finite element method

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KW - microelectromechanical device

KW - optical attenuator

KW - electromagnetic wave diffraction

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