Transformation of semiconductor surfaces due to low-energy particle impacts

E. Pincik, H. Gleskova, J. Mullerova, S. Mraz, R. Jurani, M. Zahoran, M. Jergel, R. Brunner, K. Gmucova, R. A. C. M. M. van Swaaij, M. Zeman, M. Kucera

Research output: Chapter in Book/Report/Conference proceedingConference contribution book

Abstract

This paper looks at the transformation of semiconductor surfaces due to low-energy particle impacts
Original languageEnglish
Title of host publicationProceedings of the 7th international workshop on applied physics of condensed matter
Subtitle of host publicationAPCOM 2001
EditorsJ. Mudron, P. Sutta, J. Mullerova, J. Vajda, D. Barancok
Place of PublicationSlovakia
Pages138-141
Number of pages4
Publication statusPublished - Sep 2001

Publication series

NameInternational Workshop on Applied Physics of Condensed Matter held in Liptovský Mikuláš, Demänovská dolina, Slovakia, September 2001

Keywords

  • transformation
  • semiconductor surfaces`
  • low energy particle

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