Transformation of semiconductor surfaces due to low-energy particle impacts

E.  Pincik; H. Gleskova; J. Mullerova; S. Mraz; R. Jurani; M.  Zahoran; M.  Jergel; R. Brunner; K. Gmucova; R. A. C. M. M. van Swaaij; M. Zeman; M.  Kucera

Transformation of semiconductor surfaces due to low-energy particle impacts

E. Pincik, H. Gleskova, J. Mullerova, S. Mraz, R. Jurani, M. Zahoran, M. Jergel, R. Brunner, K. Gmucova, R. A. C. M. M. van Swaaij, M. Zeman, M. Kucera

Electronic And Electrical Engineering

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution book

Abstract

This paper looks at the transformation of semiconductor surfaces due to low-energy particle impacts

Original language	English
Title of host publication	Proceedings of the 7th international workshop on applied physics of condensed matter
Subtitle of host publication	APCOM 2001
Editors	J. Mudron, P. Sutta, J. Mullerova, J. Vajda, D. Barancok
Place of Publication	Slovakia
Pages	138-141
Number of pages	4
Publication status	Published - Sept 2001

Publication series

Name	International Workshop on Applied Physics of Condensed Matter held in Liptovský Mikuláš, Demänovská dolina, Slovakia, September 2001

Keywords

transformation
semiconductor surfaces`
low energy particle

Cite this

Pincik, E., Gleskova, H., Mullerova, J., Mraz, S., Jurani, R., Zahoran, M., Jergel, M., Brunner, R., Gmucova, K., van Swaaij, R. A. C. M. M., Zeman, M., & Kucera, M. (2001). Transformation of semiconductor surfaces due to low-energy particle impacts. In J. Mudron, P. Sutta, J. Mullerova, J. Vajda, & D. Barancok (Eds.), Proceedings of the 7th international workshop on applied physics of condensed matter: APCOM 2001 (pp. 138-141). (International Workshop on Applied Physics of Condensed Matter held in Liptovský Mikuláš, Demänovská dolina, Slovakia, September 2001)..

Pincik, E. ; Gleskova, H. ; Mullerova, J. et al. / Transformation of semiconductor surfaces due to low-energy particle impacts. Proceedings of the 7th international workshop on applied physics of condensed matter: APCOM 2001. editor / J. Mudron ; P. Sutta ; J. Mullerova ; J. Vajda ; D. Barancok. Slovakia, 2001. pp. 138-141 (International Workshop on Applied Physics of Condensed Matter held in Liptovský Mikuláš, Demänovská dolina, Slovakia, September 2001).

@inproceedings{ec18cefaaadd44ddb85ae087f79207ca,

title = "Transformation of semiconductor surfaces due to low-energy particle impacts",

abstract = "This paper looks at the transformation of semiconductor surfaces due to low-energy particle impacts",

keywords = "transformation, semiconductor surfaces`, low energy particle",

author = "E. Pincik and H. Gleskova and J. Mullerova and S. Mraz and R. Jurani and M. Zahoran and M. Jergel and R. Brunner and K. Gmucova and {van Swaaij}, {R. A. C. M. M.} and M. Zeman and M. Kucera",

year = "2001",

month = sep,

language = "English",

isbn = "8080401608",

series = "International Workshop on Applied Physics of Condensed Matter held in Liptovsk{\'y} Mikul{\'a}{\v s}, Dem{\"a}novsk{\'a} dolina, Slovakia, September 2001",

pages = "138--141",

editor = "J. Mudron and P. Sutta and J. Mullerova and J. Vajda and D. Barancok",

booktitle = "Proceedings of the 7th international workshop on applied physics of condensed matter",

}

Pincik, E, Gleskova, H, Mullerova, J, Mraz, S, Jurani, R, Zahoran, M, Jergel, M, Brunner, R, Gmucova, K, van Swaaij, RACMM, Zeman, M & Kucera, M 2001, Transformation of semiconductor surfaces due to low-energy particle impacts. in J Mudron, P Sutta, J Mullerova, J Vajda & D Barancok (eds), Proceedings of the 7th international workshop on applied physics of condensed matter: APCOM 2001. International Workshop on Applied Physics of Condensed Matter held in Liptovský Mikuláš, Demänovská dolina, Slovakia, September 2001, Slovakia, pp. 138-141.

Transformation of semiconductor surfaces due to low-energy particle impacts. / Pincik, E. ; Gleskova, H.; Mullerova, J. et al.
Proceedings of the 7th international workshop on applied physics of condensed matter: APCOM 2001. ed. / J. Mudron; P. Sutta; J. Mullerova; J. Vajda; D. Barancok. Slovakia, 2001. p. 138-141 (International Workshop on Applied Physics of Condensed Matter held in Liptovský Mikuláš, Demänovská dolina, Slovakia, September 2001).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution book

TY - GEN

T1 - Transformation of semiconductor surfaces due to low-energy particle impacts

AU - Pincik, E.

AU - Gleskova, H.

AU - Mullerova, J.

AU - Mraz, S.

AU - Jurani, R.

AU - Zahoran, M.

AU - Jergel, M.

AU - Brunner, R.

AU - Gmucova, K.

AU - van Swaaij, R. A. C. M. M.

AU - Zeman, M.

AU - Kucera, M.

PY - 2001/9

Y1 - 2001/9

N2 - This paper looks at the transformation of semiconductor surfaces due to low-energy particle impacts

AB - This paper looks at the transformation of semiconductor surfaces due to low-energy particle impacts

KW - transformation

KW - semiconductor surfaces`

KW - low energy particle

M3 - Conference contribution book

SN - 8080401608

T3 - International Workshop on Applied Physics of Condensed Matter held in Liptovský Mikuláš, Demänovská dolina, Slovakia, September 2001

SP - 138

EP - 141

BT - Proceedings of the 7th international workshop on applied physics of condensed matter

A2 - Mudron, J.

A2 - Sutta, P.

A2 - Mullerova, J.

A2 - Vajda, J.

A2 - Barancok, D.

CY - Slovakia

ER -

Pincik E, Gleskova H, Mullerova J, Mraz S, Jurani R, Zahoran M et al. Transformation of semiconductor surfaces due to low-energy particle impacts. In Mudron J, Sutta P, Mullerova J, Vajda J, Barancok D, editors, Proceedings of the 7th international workshop on applied physics of condensed matter: APCOM 2001. Slovakia. 2001. p. 138-141. (International Workshop on Applied Physics of Condensed Matter held in Liptovský Mikuláš, Demänovská dolina, Slovakia, September 2001).

Transformation of semiconductor surfaces due to low-energy particle impacts

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