Towards the development of a frequency agile MEMS acoustic sensor system

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Designing acoustic sensors with adaptable frequency responses is of great interest in order to deal with diverse application requirements. A bio-inspired acoustic concept exploiting frequency agility using a MEMS microphone front-end is presented. Simulations and experimental results show adaptations of the microphone’s acoustic frequency response according to applied DC voltage potentials. Finally, the microphone is demonstrated as part of an integrated adaptive frequency sensor feedback loop. Such acoustic sensor systems can be used in many applications requiring high frequency discrimination and agile tuning.
Original languageEnglish
Title of host publicationIEEE SENSORS 2017
Place of PublicationPiscataway, NJ
Number of pages3
ISBN (Electronic)9781509010127
Publication statusPublished - 25 Dec 2017
EventIEEE SENSORS 2017 - Scottish Exhibition and Conference Centre, Glasgow, United Kingdom
Duration: 29 Oct 20171 Nov 2017


ConferenceIEEE SENSORS 2017
CountryUnited Kingdom
Internet address


  • bio-inspired acoustic transducer
  • frequency agility
  • MEMS microphone
  • feedback system
  • piezoelectric sensing
  • capacitive actuation
  • prototyping

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