Abstract
Anodically bonded etched silicon microfluidic devices that allow infrared spectroscopic measurement of solutions are reported. These extend spatially well-resolved in situ infrared measurement to higher temperatures and pressures than previously reported, making them useful for effectively time-resolved measurement of realistic catalytic processes. A data processing technique necessary for the mitigation of interference fringes caused by multiple reflections of the probe beam is also described
Original language | English |
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Article number | 024101 |
Number of pages | 17 |
Journal | Review of Scientific Instruments |
Volume | 87 |
Early online date | 19 Feb 2016 |
DOIs | |
Publication status | E-pub ahead of print - 19 Feb 2016 |
Keywords
- microfluidic devices
- synchrotron
- infrared
- spectroscopic measurement
- catalytic process
- interference fringes