Thin film diamond membranes bonded on-demand with SOI ring resonators

Research output: Contribution to journalArticle

1 Citation (Scopus)

Abstract

The hybrid integration of single-crystal (SC) diamond membranes with on-chip optical devices will allow the demonstration of many applications such as scalable spin register entanglement. Limited dimensions of high optical quality diamond however restrict the size and number of devices that can be fabricated on a single chip, which impedes the use of diamond in large photonic integrated circuitry. Here we show the fabrication and integration of a 1μm thick SC diamond membrane with a silicon photonic device. The quality of the diamond-silicon interface is measured using SEM and optical techniques. Silicon microring resonators are measured after integration with the diamond film and show a low excess loss of 0.4 dB and a group index dispersion that is dependent on the mode confinement in the diamond layer.
LanguageEnglish
Pages215-221
Number of pages7
JournalDiamond and Related Materials
Volume88
Early online date26 Jul 2018
DOIs
Publication statusPublished - 30 Sep 2018

Fingerprint

Diamond
SOI (semiconductors)
Resonators
Diamonds
resonators
diamonds
membranes
Membranes
Thin films
rings
Silicon
thin films
silicon
chips
Single crystals
photonics
Photonic devices
single crystals
Diamond films
registers

Keywords

  • thin film
  • on-chip optical devices
  • ring resonators

Cite this

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title = "Thin film diamond membranes bonded on-demand with SOI ring resonators",
abstract = "The hybrid integration of single-crystal (SC) diamond membranes with on-chip optical devices will allow the demonstration of many applications such as scalable spin register entanglement. Limited dimensions of high optical quality diamond however restrict the size and number of devices that can be fabricated on a single chip, which impedes the use of diamond in large photonic integrated circuitry. Here we show the fabrication and integration of a 1μm thick SC diamond membrane with a silicon photonic device. The quality of the diamond-silicon interface is measured using SEM and optical techniques. Silicon microring resonators are measured after integration with the diamond film and show a low excess loss of 0.4 dB and a group index dispersion that is dependent on the mode confinement in the diamond layer.",
keywords = "thin film, on-chip optical devices, ring resonators",
author = "Paul Hill and Erdan Gu and Dawson, {Martin D.} and Strain, {Michael J.}",
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AU - Hill, Paul

AU - Gu, Erdan

AU - Dawson, Martin D.

AU - Strain, Michael J.

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Y1 - 2018/9/30

N2 - The hybrid integration of single-crystal (SC) diamond membranes with on-chip optical devices will allow the demonstration of many applications such as scalable spin register entanglement. Limited dimensions of high optical quality diamond however restrict the size and number of devices that can be fabricated on a single chip, which impedes the use of diamond in large photonic integrated circuitry. Here we show the fabrication and integration of a 1μm thick SC diamond membrane with a silicon photonic device. The quality of the diamond-silicon interface is measured using SEM and optical techniques. Silicon microring resonators are measured after integration with the diamond film and show a low excess loss of 0.4 dB and a group index dispersion that is dependent on the mode confinement in the diamond layer.

AB - The hybrid integration of single-crystal (SC) diamond membranes with on-chip optical devices will allow the demonstration of many applications such as scalable spin register entanglement. Limited dimensions of high optical quality diamond however restrict the size and number of devices that can be fabricated on a single chip, which impedes the use of diamond in large photonic integrated circuitry. Here we show the fabrication and integration of a 1μm thick SC diamond membrane with a silicon photonic device. The quality of the diamond-silicon interface is measured using SEM and optical techniques. Silicon microring resonators are measured after integration with the diamond film and show a low excess loss of 0.4 dB and a group index dispersion that is dependent on the mode confinement in the diamond layer.

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KW - on-chip optical devices

KW - ring resonators

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