Thermoelectrically controlled varifocal micromirror for near aberration free imaging

Lì Lì, Ran Li, Walter Lubeigt, Deepak G. Uttamchandani

Research output: Chapter in Book/Report/Conference proceedingConference contribution book

1 Citation (Scopus)

Abstract

A close-loop-controlled miniature Peltier element was used to vary the temperature of a 1.2 mm diameter silicon-gold bimorph varifocal micromirror (VFM), thereby changing its radius of curvature due to differential thermal expansion of the two materials. By varying the VFM temperature from 10°C to 100°C, the radius of curvature (ROC) of the micromirror was measured to vary from 19.2mm to 30.9mm. The Zernike coefficients over this operational range were analysed to be less than a few micrometres. An imaging system utilising the VFM was assembled, and examples of the near aberration-free images obtained are presented.
Original languageEnglish
Title of host publication2013 International Conference on Optical MEMS and Nanophotonics (OMN)
Place of PublicationPiscataway, NJ, United States
PublisherIEEE
Pages17-18
Number of pages2
ISBN (Print)9781479915125
DOIs
Publication statusPublished - 1 Dec 2013

Keywords

  • close-loop-controlled miniature Peltier element
  • Zernike coefficients
  • Si-Au
  • differential thermal expansion
  • silicon-gold bimorph varifocal micromirror

Cite this

Lì, L., Li, R., Lubeigt, W., & Uttamchandani, D. G. (2013). Thermoelectrically controlled varifocal micromirror for near aberration free imaging. In 2013 International Conference on Optical MEMS and Nanophotonics (OMN) (pp. 17-18). IEEE. https://doi.org/10.1109/OMN.2013.6659037