Thermoelectrically controlled varifocal micromirror for near aberration free imaging

Lì Lì, Ran Li, Walter Lubeigt, Deepak G. Uttamchandani

Research output: Chapter in Book/Report/Conference proceedingConference contribution book

1 Citation (Scopus)

Abstract

A close-loop-controlled miniature Peltier element was used to vary the temperature of a 1.2 mm diameter silicon-gold bimorph varifocal micromirror (VFM), thereby changing its radius of curvature due to differential thermal expansion of the two materials. By varying the VFM temperature from 10°C to 100°C, the radius of curvature (ROC) of the micromirror was measured to vary from 19.2mm to 30.9mm. The Zernike coefficients over this operational range were analysed to be less than a few micrometres. An imaging system utilising the VFM was assembled, and examples of the near aberration-free images obtained are presented.
LanguageEnglish
Title of host publication2013 International Conference on Optical MEMS and Nanophotonics (OMN)
Place of PublicationPiscataway, NJ, United States
PublisherIEEE
Pages17-18
Number of pages2
ISBN (Print)9781479915125
DOIs
Publication statusPublished - 1 Dec 2013

Fingerprint

aberration
curvature
radii
micrometers
thermal expansion
gold
temperature
silicon
coefficients

Keywords

  • close-loop-controlled miniature Peltier element
  • Zernike coefficients
  • Si-Au
  • differential thermal expansion
  • silicon-gold bimorph varifocal micromirror

Cite this

Lì, L., Li, R., Lubeigt, W., & Uttamchandani, D. G. (2013). Thermoelectrically controlled varifocal micromirror for near aberration free imaging. In 2013 International Conference on Optical MEMS and Nanophotonics (OMN) (pp. 17-18). Piscataway, NJ, United States: IEEE. https://doi.org/10.1109/OMN.2013.6659037
Lì, Lì ; Li, Ran ; Lubeigt, Walter ; Uttamchandani, Deepak G. / Thermoelectrically controlled varifocal micromirror for near aberration free imaging. 2013 International Conference on Optical MEMS and Nanophotonics (OMN) . Piscataway, NJ, United States : IEEE, 2013. pp. 17-18
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abstract = "A close-loop-controlled miniature Peltier element was used to vary the temperature of a 1.2 mm diameter silicon-gold bimorph varifocal micromirror (VFM), thereby changing its radius of curvature due to differential thermal expansion of the two materials. By varying the VFM temperature from 10°C to 100°C, the radius of curvature (ROC) of the micromirror was measured to vary from 19.2mm to 30.9mm. The Zernike coefficients over this operational range were analysed to be less than a few micrometres. An imaging system utilising the VFM was assembled, and examples of the near aberration-free images obtained are presented.",
keywords = "close-loop-controlled miniature Peltier element, Zernike coefficients, Si-Au, differential thermal expansion, silicon-gold bimorph varifocal micromirror",
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Lì, L, Li, R, Lubeigt, W & Uttamchandani, DG 2013, Thermoelectrically controlled varifocal micromirror for near aberration free imaging. in 2013 International Conference on Optical MEMS and Nanophotonics (OMN) . IEEE, Piscataway, NJ, United States, pp. 17-18. https://doi.org/10.1109/OMN.2013.6659037

Thermoelectrically controlled varifocal micromirror for near aberration free imaging. / Lì, Lì; Li, Ran; Lubeigt, Walter; Uttamchandani, Deepak G.

2013 International Conference on Optical MEMS and Nanophotonics (OMN) . Piscataway, NJ, United States : IEEE, 2013. p. 17-18.

Research output: Chapter in Book/Report/Conference proceedingConference contribution book

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Lì L, Li R, Lubeigt W, Uttamchandani DG. Thermoelectrically controlled varifocal micromirror for near aberration free imaging. In 2013 International Conference on Optical MEMS and Nanophotonics (OMN) . Piscataway, NJ, United States: IEEE. 2013. p. 17-18 https://doi.org/10.1109/OMN.2013.6659037