Thermal dynamics of 2-axis electrothermal MEMS micromirrors

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Abstract

We present the dynamic analysis of a 2-axis electrothermal MEMS scanner, focusing on the step response times for random access imaging. The 1.2 mm diameter single layer silicon mirror shows rise times in the 10-40 ms range for angle changes of 0.4°-4.7°, while fall times are 5-15 ms for the same range, leading to the potential of advanced optimization path planning.
Original languageEnglish
Number of pages2
DOIs
Publication statusPublished - 9 Dec 2019
EventIEEE International Conference on Optical MEMS and Nanophotonics (OMN2019) - KAIST, Daejeon, Korea, Republic of
Duration: 28 Jul 20191 Aug 2019
http://www.omn2019.org.

Conference

ConferenceIEEE International Conference on Optical MEMS and Nanophotonics (OMN2019)
Abbreviated titleOMN2019
Country/TerritoryKorea, Republic of
CityDaejeon
Period28/07/191/08/19
Internet address

Keywords

  • electrothermal MEMS scanner
  • 2D micromirror
  • thermal dynamics

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