Thermal dynamics of 2-axis electrothermal MEMS micromirrors

Research output: Contribution to conferencePaper

Abstract

We present the dynamic analysis of a 2-axis electrothermal MEMS scanner, focusing on the step response times for random access imaging. The 1.2 mm diameter single layer silicon mirror shows rise times in the 10-40 ms range for angle changes of 0.4°-4.7°, while fall times are 5-15 ms for the same range, leading to the potential of advanced optimization path planning.

Conference

ConferenceIEEE International conference on Optical MEMS and Nanophotonics: OMN2019
Abbreviated titleOMN2019
CountryKorea, Republic of
CityDaejeon
Period28/07/191/08/19
Internet address

Fingerprint

Step response
Motion planning
Dynamic analysis
MEMS
Mirrors
Imaging techniques
Silicon
Hot Temperature

Keywords

  • electrothermal MEMS scanner
  • 2D micromirror
  • thermal dynamics

Cite this

Donnachie, M., Uttamchandani, D., & Bauer, R. (Accepted/In press). Thermal dynamics of 2-axis electrothermal MEMS micromirrors. Paper presented at IEEE International conference on Optical MEMS and Nanophotonics: OMN2019, Daejeon, Korea, Republic of.
Donnachie, Mark ; Uttamchandani, Deepak ; Bauer, Ralf. / Thermal dynamics of 2-axis electrothermal MEMS micromirrors. Paper presented at IEEE International conference on Optical MEMS and Nanophotonics: OMN2019, Daejeon, Korea, Republic of.2 p.
@conference{95d32370f85849a9b87c29cf8afd6b7d,
title = "Thermal dynamics of 2-axis electrothermal MEMS micromirrors",
abstract = "We present the dynamic analysis of a 2-axis electrothermal MEMS scanner, focusing on the step response times for random access imaging. The 1.2 mm diameter single layer silicon mirror shows rise times in the 10-40 ms range for angle changes of 0.4°-4.7°, while fall times are 5-15 ms for the same range, leading to the potential of advanced optimization path planning.",
keywords = "electrothermal MEMS scanner, 2D micromirror, thermal dynamics",
author = "Mark Donnachie and Deepak Uttamchandani and Ralf Bauer",
year = "2019",
month = "6",
day = "3",
language = "English",
note = "IEEE International conference on Optical MEMS and Nanophotonics: OMN2019, OMN2019 ; Conference date: 28-07-2019 Through 01-08-2019",
url = "http://www.omn2019.org.",

}

Donnachie, M, Uttamchandani, D & Bauer, R 2019, 'Thermal dynamics of 2-axis electrothermal MEMS micromirrors' Paper presented at IEEE International conference on Optical MEMS and Nanophotonics: OMN2019, Daejeon, Korea, Republic of, 28/07/19 - 1/08/19, .

Thermal dynamics of 2-axis electrothermal MEMS micromirrors. / Donnachie, Mark; Uttamchandani, Deepak; Bauer, Ralf.

2019. Paper presented at IEEE International conference on Optical MEMS and Nanophotonics: OMN2019, Daejeon, Korea, Republic of.

Research output: Contribution to conferencePaper

TY - CONF

T1 - Thermal dynamics of 2-axis electrothermal MEMS micromirrors

AU - Donnachie, Mark

AU - Uttamchandani, Deepak

AU - Bauer, Ralf

PY - 2019/6/3

Y1 - 2019/6/3

N2 - We present the dynamic analysis of a 2-axis electrothermal MEMS scanner, focusing on the step response times for random access imaging. The 1.2 mm diameter single layer silicon mirror shows rise times in the 10-40 ms range for angle changes of 0.4°-4.7°, while fall times are 5-15 ms for the same range, leading to the potential of advanced optimization path planning.

AB - We present the dynamic analysis of a 2-axis electrothermal MEMS scanner, focusing on the step response times for random access imaging. The 1.2 mm diameter single layer silicon mirror shows rise times in the 10-40 ms range for angle changes of 0.4°-4.7°, while fall times are 5-15 ms for the same range, leading to the potential of advanced optimization path planning.

KW - electrothermal MEMS scanner

KW - 2D micromirror

KW - thermal dynamics

UR - http://www.omn2019.org/

M3 - Paper

ER -

Donnachie M, Uttamchandani D, Bauer R. Thermal dynamics of 2-axis electrothermal MEMS micromirrors. 2019. Paper presented at IEEE International conference on Optical MEMS and Nanophotonics: OMN2019, Daejeon, Korea, Republic of.