Projects per year
Abstract
We present the dynamic analysis of a 2-axis electrothermal MEMS scanner, focusing on the step response times for random access imaging. The 1.2 mm diameter single layer silicon mirror shows rise times in the 10-40 ms range for angle changes of 0.4°-4.7°, while fall times are 5-15 ms for the same range, leading to the potential of advanced optimization path planning.
Original language | English |
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Number of pages | 2 |
DOIs | |
Publication status | Published - 9 Dec 2019 |
Event | IEEE International Conference on Optical MEMS and Nanophotonics (OMN2019) - KAIST, Daejeon, Korea, Republic of Duration: 28 Jul 2019 → 1 Aug 2019 http://www.omn2019.org. |
Conference
Conference | IEEE International Conference on Optical MEMS and Nanophotonics (OMN2019) |
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Abbreviated title | OMN2019 |
Country/Territory | Korea, Republic of |
City | Daejeon |
Period | 28/07/19 → 1/08/19 |
Internet address |
Keywords
- electrothermal MEMS scanner
- 2D micromirror
- thermal dynamics
Fingerprint
Dive into the research topics of 'Thermal dynamics of 2-axis electrothermal MEMS micromirrors'. Together they form a unique fingerprint.Projects
- 2 Finished
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Doctoral Training Partnership 2018-19 University of Strathclyde | Donnachie, Mark
Bauer, R. (Principal Investigator), Uttamchandani, D. (Co-investigator) & Donnachie, M. (Research Co-investigator)
EPSRC (Engineering and Physical Sciences Research Council)
1/10/18 → 1/07/22
Project: Research Studentship - Internally Allocated
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Miniaturised 3D-printed biomedical imaging system using optical MEMS - RAE Fellowships (GCRF)
Bauer, R. (Principal Investigator)
Royal Academy of Engineering RAE
1/10/16 → 30/09/21
Project: Research Fellowship
Datasets
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Data for: "Thermal dynamics of 2-axis electrothermal MEMS micromirrors"
Bauer, R. (Supervisor), Donnachie, M. (Creator) & Uttamchandani, D. (Supervisor), University of Strathclyde, 6 Jun 2023
DOI: 10.15129/d4cda97d-9fcb-442a-bdb7-58b8e2547a9a
Dataset
Activities
- 1 Oral presentation
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Conference talks on projects in optical MEMS for biomedical imaging and quantum optics
Bauer, R. (Speaker)
28 Jul 2019 → 1 Aug 2019Activity: Talk or presentation types › Oral presentation