Thermal dynamics of 2-axis electrothermal MEMS micromirrors

Mark Donnachie; Deepak Uttamchandani; Ralf Bauer

doi:10.1109/OMN.2019.8925050

Thermal dynamics of 2-axis electrothermal MEMS micromirrors

Mark Donnachie, Deepak Uttamchandani, Ralf Bauer

Electronic And Electrical Engineering

Research output: Contribution to conference › Paper › peer-review

1 Citation (Scopus)

29 Downloads (Pure)

Abstract

We present the dynamic analysis of a 2-axis electrothermal MEMS scanner, focusing on the step response times for random access imaging. The 1.2 mm diameter single layer silicon mirror shows rise times in the 10-40 ms range for angle changes of 0.4°-4.7°, while fall times are 5-15 ms for the same range, leading to the potential of advanced optimization path planning.

Original language	English
Number of pages	2
DOIs	https://doi.org/10.1109/OMN.2019.8925050
Publication status	Published - 9 Dec 2019
Event	IEEE International Conference on Optical MEMS and Nanophotonics (OMN2019) - KAIST, Daejeon, Korea, Republic of Duration: 28 Jul 2019 → 1 Aug 2019 http://www.omn2019.org.

Conference

Conference	IEEE International Conference on Optical MEMS and Nanophotonics (OMN2019)
Abbreviated title	OMN2019
Country/Territory	Korea, Republic of
City	Daejeon
Period	28/07/19 → 1/08/19
Internet address	http://www.omn2019.org.

Keywords

electrothermal MEMS scanner
2D micromirror
thermal dynamics

Access to Document

10.1109/OMN.2019.8925050

Donnachie-etal-OMN-2019-Thermal-dynamics-of-2-axis-electrothermalAccepted author manuscript, 569 KB

Doctoral Training Partnership 2018-19 University of Strathclyde | Donnachie, Mark
Bauer, R. (Principal Investigator), Uttamchandani, D. (Co-investigator) & Donnachie, M. (Research Co-investigator)
EPSRC (Engineering and Physical Sciences Research Council)
1/10/18 → 1/07/22
Project: Research Studentship - Internally Allocated
Miniaturised 3D-printed biomedical imaging system using optical MEMS - RAE Fellowships (GCRF)
Bauer, R. (Principal Investigator)
Royal Academy of Engineering RAE
1/10/16 → 30/09/21
Project: Research Fellowship

Data for: "Thermal dynamics of 2-axis electrothermal MEMS micromirrors"
Bauer, R. (Supervisor), Donnachie, M. (Creator) & Uttamchandani, D. (Supervisor), University of Strathclyde, 6 Jun 2023
DOI: 10.15129/d4cda97d-9fcb-442a-bdb7-58b8e2547a9a
Dataset

Conference talks on projects in optical MEMS for biomedical imaging and quantum optics
Bauer, R. (Speaker)
28 Jul 2019 → 1 Aug 2019
Activity: Talk or presentation types › Oral presentation

Cite this

@conference{95d32370f85849a9b87c29cf8afd6b7d,

title = "Thermal dynamics of 2-axis electrothermal MEMS micromirrors",

abstract = "We present the dynamic analysis of a 2-axis electrothermal MEMS scanner, focusing on the step response times for random access imaging. The 1.2 mm diameter single layer silicon mirror shows rise times in the 10-40 ms range for angle changes of 0.4°-4.7°, while fall times are 5-15 ms for the same range, leading to the potential of advanced optimization path planning.",

keywords = "electrothermal MEMS scanner, 2D micromirror, thermal dynamics",

author = "Mark Donnachie and Deepak Uttamchandani and Ralf Bauer",

note = "{\textcopyright} 2019 IEEE. Personal use of this material is permitted. Permission from IEEE must be obtained for all other uses, in any current or future media, including reprinting /republishing this material for advertising or promotional purposes, creating new collective works, for resale or redistribution to servers or lists, or reuse of any copyrighted component of this work in other works.; IEEE International Conference on Optical MEMS and Nanophotonics (OMN2019), OMN2019 ; Conference date: 28-07-2019 Through 01-08-2019",

year = "2019",

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day = "9",

doi = "10.1109/OMN.2019.8925050",

language = "English",

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TY - CONF

T1 - Thermal dynamics of 2-axis electrothermal MEMS micromirrors

AU - Donnachie, Mark

AU - Uttamchandani, Deepak

AU - Bauer, Ralf

N1 - © 2019 IEEE. Personal use of this material is permitted. Permission from IEEE must be obtained for all other uses, in any current or future media, including reprinting /republishing this material for advertising or promotional purposes, creating new collective works, for resale or redistribution to servers or lists, or reuse of any copyrighted component of this work in other works.

PY - 2019/12/9

Y1 - 2019/12/9

N2 - We present the dynamic analysis of a 2-axis electrothermal MEMS scanner, focusing on the step response times for random access imaging. The 1.2 mm diameter single layer silicon mirror shows rise times in the 10-40 ms range for angle changes of 0.4°-4.7°, while fall times are 5-15 ms for the same range, leading to the potential of advanced optimization path planning.

AB - We present the dynamic analysis of a 2-axis electrothermal MEMS scanner, focusing on the step response times for random access imaging. The 1.2 mm diameter single layer silicon mirror shows rise times in the 10-40 ms range for angle changes of 0.4°-4.7°, while fall times are 5-15 ms for the same range, leading to the potential of advanced optimization path planning.

KW - electrothermal MEMS scanner

KW - 2D micromirror

KW - thermal dynamics

U2 - 10.1109/OMN.2019.8925050

DO - 10.1109/OMN.2019.8925050

M3 - Paper

T2 - IEEE International Conference on Optical MEMS and Nanophotonics (OMN2019)

Y2 - 28 July 2019 through 1 August 2019

ER -

Thermal dynamics of 2-axis electrothermal MEMS micromirrors

Abstract

Conference

Keywords

Access to Document

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Projects

Doctoral Training Partnership 2018-19 University of Strathclyde | Donnachie, Mark

Miniaturised 3D-printed biomedical imaging system using optical MEMS - RAE Fellowships (GCRF)

Datasets

Data for: "Thermal dynamics of 2-axis electrothermal MEMS micromirrors"

Activities

Conference talks on projects in optical MEMS for biomedical imaging and quantum optics

Cite this