Theory of rf-driven plasma sheath

D D Tskhakaya; P K Shukla; B Eliasson; S Kuhn

doi:10.1088/0031-8949/74/6/015

Theory of rf-driven plasma sheath

D D Tskhakaya, P K Shukla, B Eliasson, S Kuhn

Research output: Contribution to journal › Article › peer-review

Abstract

The properties of the plasma-wall transition layer in the presence of a radio-frequency (rf) electric field are studied theoretically and numerically. When the electrostatic potential is positive at the wall compared to the potential in the bulk plasma, the positive ions are repelled from the wall by the potential, while the electrons are repelled by the ponderomotive force of the rf field. The result is that the plasma is almost completely evacuated at the wall, and is efficiently confined.

Original language	English
Pages (from-to)	686-691
Number of pages	6
Journal	Physica Scripta
Volume	74
Issue number	6
DOIs	https://doi.org/10.1088/0031-8949/74/6/015
Publication status	Published - 9 Nov 2006

Keywords

plasma sheath
plasma wall transition
radio frequency (rf) electric field
ponderomotive force

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10.1088/0031-8949/74/6/015

Cite this

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title = "Theory of rf-driven plasma sheath",

abstract = "The properties of the plasma-wall transition layer in the presence of a radio-frequency (rf) electric field are studied theoretically and numerically. When the electrostatic potential is positive at the wall compared to the potential in the bulk plasma, the positive ions are repelled from the wall by the potential, while the electrons are repelled by the ponderomotive force of the rf field. The result is that the plasma is almost completely evacuated at the wall, and is efficiently confined.",

keywords = "plasma sheath, plasma wall transition, radio frequency (rf) electric field, ponderomotive force",

author = "Tskhakaya, {D D} and Shukla, {P K} and B Eliasson and S Kuhn",

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T1 - Theory of rf-driven plasma sheath

AU - Tskhakaya, D D

AU - Shukla, P K

AU - Eliasson, B

AU - Kuhn, S

PY - 2006/11/9

Y1 - 2006/11/9

N2 - The properties of the plasma-wall transition layer in the presence of a radio-frequency (rf) electric field are studied theoretically and numerically. When the electrostatic potential is positive at the wall compared to the potential in the bulk plasma, the positive ions are repelled from the wall by the potential, while the electrons are repelled by the ponderomotive force of the rf field. The result is that the plasma is almost completely evacuated at the wall, and is efficiently confined.

AB - The properties of the plasma-wall transition layer in the presence of a radio-frequency (rf) electric field are studied theoretically and numerically. When the electrostatic potential is positive at the wall compared to the potential in the bulk plasma, the positive ions are repelled from the wall by the potential, while the electrons are repelled by the ponderomotive force of the rf field. The result is that the plasma is almost completely evacuated at the wall, and is efficiently confined.

KW - plasma sheath

KW - plasma wall transition

KW - radio frequency (rf) electric field

KW - ponderomotive force

UR - http://dx.doi.org/10.1088/0031-8949/74/6/015

U2 - 10.1088/0031-8949/74/6/015

DO - 10.1088/0031-8949/74/6/015

M3 - Article

SN - 0031-8949

VL - 74

SP - 686

EP - 691

JO - Physica Scripta

JF - Physica Scripta

IS - 6

ER -

Theory of rf-driven plasma sheath

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Keywords

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