The experimental evaluation of the dynamics of fluid-loaded microplates

Zhangming Wu, Mike T. Wright, Xianghong Ma

Research output: Contribution to journalArticle

7 Citations (Scopus)

Abstract

An experimental testing system for the study of the dynamic behavior of fluid-loaded rectangular micromachined silicon plates is designed and presented in this paper. In this experimental system, the base-excitation technique combined with pseudo-random signal and cross-correlation analysis is applied to test fluid-loaded microstructures. Theoretical model is also derived to reveal the mechanism of such an experimental system in the application of testing fluid-loaded microstructures. The dynamic experiments cover a series of testings of various microplates with different boundary conditions and dimensions, both in air and immersed in water. This paper is the first that demonstrates the ability and performances of base excitation in the application of dynamic testing of microstructures that involves a natural fluid environment. Traditional modal analysis approaches are used to evaluate natural frequencies, modal damping and mode shapes from the experimental data. The obtained experimental results are discussed and compared with theoretical predictions. This research experimentally determines the dynamic characteristics of the fluid-loaded silicon microplates, which can contribute to the design of plate-based microsystems. The experimental system and testing approaches presented in this paper can be widely applied to the investigation of the dynamics of microstructures and nanostructures.
LanguageEnglish
Article number075034
Number of pages10
JournalJournal of Micromechanics and Microengineering
Volume20
Issue number7
DOIs
Publication statusPublished - 17 Jun 2010

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Fluids
Testing
Microstructure
Silicon
Microsystems
Modal analysis
Natural frequencies
Nanostructures
Damping
Boundary conditions
Water
Air
Experiments

Keywords

  • Experimental dynamics
  • fluid dynamics
  • microfabrication

Cite this

Wu, Zhangming ; Wright, Mike T. ; Ma, Xianghong. / The experimental evaluation of the dynamics of fluid-loaded microplates. In: Journal of Micromechanics and Microengineering. 2010 ; Vol. 20, No. 7.
@article{c74b4021eb3747898948d10fd07e341c,
title = "The experimental evaluation of the dynamics of fluid-loaded microplates",
abstract = "An experimental testing system for the study of the dynamic behavior of fluid-loaded rectangular micromachined silicon plates is designed and presented in this paper. In this experimental system, the base-excitation technique combined with pseudo-random signal and cross-correlation analysis is applied to test fluid-loaded microstructures. Theoretical model is also derived to reveal the mechanism of such an experimental system in the application of testing fluid-loaded microstructures. The dynamic experiments cover a series of testings of various microplates with different boundary conditions and dimensions, both in air and immersed in water. This paper is the first that demonstrates the ability and performances of base excitation in the application of dynamic testing of microstructures that involves a natural fluid environment. Traditional modal analysis approaches are used to evaluate natural frequencies, modal damping and mode shapes from the experimental data. The obtained experimental results are discussed and compared with theoretical predictions. This research experimentally determines the dynamic characteristics of the fluid-loaded silicon microplates, which can contribute to the design of plate-based microsystems. The experimental system and testing approaches presented in this paper can be widely applied to the investigation of the dynamics of microstructures and nanostructures.",
keywords = "Experimental dynamics, fluid dynamics, microfabrication",
author = "Zhangming Wu and Wright, {Mike T.} and Xianghong Ma",
year = "2010",
month = "6",
day = "17",
doi = "10.1088/0960-1317/20/7/075034",
language = "English",
volume = "20",
journal = "Journal of Micromechanics and Microengineering",
issn = "0960-1317",
number = "7",

}

The experimental evaluation of the dynamics of fluid-loaded microplates. / Wu, Zhangming; Wright, Mike T.; Ma, Xianghong.

In: Journal of Micromechanics and Microengineering, Vol. 20, No. 7, 075034, 17.06.2010.

Research output: Contribution to journalArticle

TY - JOUR

T1 - The experimental evaluation of the dynamics of fluid-loaded microplates

AU - Wu, Zhangming

AU - Wright, Mike T.

AU - Ma, Xianghong

PY - 2010/6/17

Y1 - 2010/6/17

N2 - An experimental testing system for the study of the dynamic behavior of fluid-loaded rectangular micromachined silicon plates is designed and presented in this paper. In this experimental system, the base-excitation technique combined with pseudo-random signal and cross-correlation analysis is applied to test fluid-loaded microstructures. Theoretical model is also derived to reveal the mechanism of such an experimental system in the application of testing fluid-loaded microstructures. The dynamic experiments cover a series of testings of various microplates with different boundary conditions and dimensions, both in air and immersed in water. This paper is the first that demonstrates the ability and performances of base excitation in the application of dynamic testing of microstructures that involves a natural fluid environment. Traditional modal analysis approaches are used to evaluate natural frequencies, modal damping and mode shapes from the experimental data. The obtained experimental results are discussed and compared with theoretical predictions. This research experimentally determines the dynamic characteristics of the fluid-loaded silicon microplates, which can contribute to the design of plate-based microsystems. The experimental system and testing approaches presented in this paper can be widely applied to the investigation of the dynamics of microstructures and nanostructures.

AB - An experimental testing system for the study of the dynamic behavior of fluid-loaded rectangular micromachined silicon plates is designed and presented in this paper. In this experimental system, the base-excitation technique combined with pseudo-random signal and cross-correlation analysis is applied to test fluid-loaded microstructures. Theoretical model is also derived to reveal the mechanism of such an experimental system in the application of testing fluid-loaded microstructures. The dynamic experiments cover a series of testings of various microplates with different boundary conditions and dimensions, both in air and immersed in water. This paper is the first that demonstrates the ability and performances of base excitation in the application of dynamic testing of microstructures that involves a natural fluid environment. Traditional modal analysis approaches are used to evaluate natural frequencies, modal damping and mode shapes from the experimental data. The obtained experimental results are discussed and compared with theoretical predictions. This research experimentally determines the dynamic characteristics of the fluid-loaded silicon microplates, which can contribute to the design of plate-based microsystems. The experimental system and testing approaches presented in this paper can be widely applied to the investigation of the dynamics of microstructures and nanostructures.

KW - Experimental dynamics

KW - fluid dynamics

KW - microfabrication

UR - https://iopscience.iop.org/journal/0960-1317

U2 - 10.1088/0960-1317/20/7/075034

DO - 10.1088/0960-1317/20/7/075034

M3 - Article

VL - 20

JO - Journal of Micromechanics and Microengineering

T2 - Journal of Micromechanics and Microengineering

JF - Journal of Micromechanics and Microengineering

SN - 0960-1317

IS - 7

M1 - 075034

ER -