The Au/SiOx/a-Si:H structures with very thin anodic oxide layers

V. A. Skryshevsky, V. I. Strikha, Helena Gleskova

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Abstract

Creation of a high-quality dielectric layer during the formation of the MIS struc-
tures on a-Si:H poses some problems. The thermic oxide, usually used in the MOSFET technology on c-Si, is inconvenient for a-Si:H because of
degradation of the a-Si:tt films owing to effusion of hydrogen deal with some successful employment of the anodic oxidation for the preparation of MIS position-sensitive detectors and for the passivation of large-area solar cells. The present paper describes the influence of the thickness of dielectric layer
prepared by the anodic oxidation on t h e I - V characteristics and optical prope r t i e s of MIS structures, of Au-SiO~-a-Si:H type .
Original languageEnglish
Pages (from-to)331-338
Number of pages8
JournalCzechoslovak Journal of Physics
Volume42
Issue number3
DOIs
Publication statusPublished - 1992

Keywords

  • anodic oxide layers
  • solar cells
  • anodic oxidation

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