Test structures to support the development and process verification of microelectrodes for high temperature operation in molten salts

E.O. Blair, D.K. Corrigan, I. Schmueser, J. G. Terry, S. Smith, A.R. Mount, A.J. Walton

Research output: Chapter in Book/Report/Conference proceedingConference contribution book

2 Citations (Scopus)

Abstract

This paper reports the design and application of test structures used for the development and characterisation of microelectrodes for operation in the harsh, caustic environment of molten salts operating at 450°C. These structures have been employed to evaluate the effect of electrode area and the dielectric integrity of insulating layers in the molten salt. This has been useful in identifying failures mechanisms, which has facilitated the optimisation of both the design and fabrication of the microelectrodes while at the same time also providing valuable information for process verification.

LanguageEnglish
Title of host publication29th IEEE ICMTS Conference Proceedings
Subtitle of host publicationMarch 28-31, Mielparque Yokohama, Japan
Place of PublicationPiscataway, NJ.
PublisherIEEE
Pages158-162
Number of pages5
ISBN (Print)9781467387934
DOIs
Publication statusPublished - 23 May 2016
Event29th IEEE International Conference on Microelectronic Test Structures, ICMTS 2016 - Yokohama, Japan
Duration: 28 Mar 201631 Mar 2016

Conference

Conference29th IEEE International Conference on Microelectronic Test Structures, ICMTS 2016
CountryJapan
CityYokohama
Period28/03/1631/03/16

Fingerprint

High temperature operations
Microelectrodes
Molten materials
Salts
Fabrication
Electrodes

Keywords

  • microelectrodes
  • silicon compounds
  • silver
  • dielectrics
  • silicon

Cite this

Blair, E. O., Corrigan, D. K., Schmueser, I., Terry, J. G., Smith, S., Mount, A. R., & Walton, A. J. (2016). Test structures to support the development and process verification of microelectrodes for high temperature operation in molten salts. In 29th IEEE ICMTS Conference Proceedings: March 28-31, Mielparque Yokohama, Japan (pp. 158-162). [7476198] Piscataway, NJ.: IEEE. https://doi.org/10.1109/ICMTS.2016.7476198
Blair, E.O. ; Corrigan, D.K. ; Schmueser, I. ; Terry, J. G. ; Smith, S. ; Mount, A.R. ; Walton, A.J. / Test structures to support the development and process verification of microelectrodes for high temperature operation in molten salts. 29th IEEE ICMTS Conference Proceedings: March 28-31, Mielparque Yokohama, Japan. Piscataway, NJ. : IEEE, 2016. pp. 158-162
@inproceedings{417b7c36c8fe40178d76adafcfd5b48d,
title = "Test structures to support the development and process verification of microelectrodes for high temperature operation in molten salts",
abstract = "This paper reports the design and application of test structures used for the development and characterisation of microelectrodes for operation in the harsh, caustic environment of molten salts operating at 450°C. These structures have been employed to evaluate the effect of electrode area and the dielectric integrity of insulating layers in the molten salt. This has been useful in identifying failures mechanisms, which has facilitated the optimisation of both the design and fabrication of the microelectrodes while at the same time also providing valuable information for process verification.",
keywords = "microelectrodes, silicon compounds, silver, dielectrics, silicon",
author = "E.O. Blair and D.K. Corrigan and I. Schmueser and Terry, {J. G.} and S. Smith and A.R. Mount and A.J. Walton",
year = "2016",
month = "5",
day = "23",
doi = "10.1109/ICMTS.2016.7476198",
language = "English",
isbn = "9781467387934",
pages = "158--162",
booktitle = "29th IEEE ICMTS Conference Proceedings",
publisher = "IEEE",

}

Blair, EO, Corrigan, DK, Schmueser, I, Terry, JG, Smith, S, Mount, AR & Walton, AJ 2016, Test structures to support the development and process verification of microelectrodes for high temperature operation in molten salts. in 29th IEEE ICMTS Conference Proceedings: March 28-31, Mielparque Yokohama, Japan., 7476198, IEEE, Piscataway, NJ., pp. 158-162, 29th IEEE International Conference on Microelectronic Test Structures, ICMTS 2016, Yokohama, Japan, 28/03/16. https://doi.org/10.1109/ICMTS.2016.7476198

Test structures to support the development and process verification of microelectrodes for high temperature operation in molten salts. / Blair, E.O.; Corrigan, D.K.; Schmueser, I.; Terry, J. G.; Smith, S.; Mount, A.R.; Walton, A.J.

29th IEEE ICMTS Conference Proceedings: March 28-31, Mielparque Yokohama, Japan. Piscataway, NJ. : IEEE, 2016. p. 158-162 7476198.

Research output: Chapter in Book/Report/Conference proceedingConference contribution book

TY - GEN

T1 - Test structures to support the development and process verification of microelectrodes for high temperature operation in molten salts

AU - Blair, E.O.

AU - Corrigan, D.K.

AU - Schmueser, I.

AU - Terry, J. G.

AU - Smith, S.

AU - Mount, A.R.

AU - Walton, A.J.

PY - 2016/5/23

Y1 - 2016/5/23

N2 - This paper reports the design and application of test structures used for the development and characterisation of microelectrodes for operation in the harsh, caustic environment of molten salts operating at 450°C. These structures have been employed to evaluate the effect of electrode area and the dielectric integrity of insulating layers in the molten salt. This has been useful in identifying failures mechanisms, which has facilitated the optimisation of both the design and fabrication of the microelectrodes while at the same time also providing valuable information for process verification.

AB - This paper reports the design and application of test structures used for the development and characterisation of microelectrodes for operation in the harsh, caustic environment of molten salts operating at 450°C. These structures have been employed to evaluate the effect of electrode area and the dielectric integrity of insulating layers in the molten salt. This has been useful in identifying failures mechanisms, which has facilitated the optimisation of both the design and fabrication of the microelectrodes while at the same time also providing valuable information for process verification.

KW - microelectrodes

KW - silicon compounds

KW - silver

KW - dielectrics

KW - silicon

UR - http://www.scopus.com/inward/record.url?scp=84974602772&partnerID=8YFLogxK

UR - http://ieeexplore.ieee.org/xpl/mostRecentIssue.jsp?punumber=7469603

U2 - 10.1109/ICMTS.2016.7476198

DO - 10.1109/ICMTS.2016.7476198

M3 - Conference contribution book

SN - 9781467387934

SP - 158

EP - 162

BT - 29th IEEE ICMTS Conference Proceedings

PB - IEEE

CY - Piscataway, NJ.

ER -

Blair EO, Corrigan DK, Schmueser I, Terry JG, Smith S, Mount AR et al. Test structures to support the development and process verification of microelectrodes for high temperature operation in molten salts. In 29th IEEE ICMTS Conference Proceedings: March 28-31, Mielparque Yokohama, Japan. Piscataway, NJ.: IEEE. 2016. p. 158-162. 7476198 https://doi.org/10.1109/ICMTS.2016.7476198