Test structures to support the development and process verification of microelectrodes for high temperature operation in molten salts

E.O. Blair, D.K. Corrigan, I. Schmueser, J. G. Terry, S. Smith, A.R. Mount, A.J. Walton

Research output: Chapter in Book/Report/Conference proceedingConference contribution book

2 Citations (Scopus)

Abstract

This paper reports the design and application of test structures used for the development and characterisation of microelectrodes for operation in the harsh, caustic environment of molten salts operating at 450°C. These structures have been employed to evaluate the effect of electrode area and the dielectric integrity of insulating layers in the molten salt. This has been useful in identifying failures mechanisms, which has facilitated the optimisation of both the design and fabrication of the microelectrodes while at the same time also providing valuable information for process verification.

Original languageEnglish
Title of host publication29th IEEE ICMTS Conference Proceedings
Subtitle of host publicationMarch 28-31, Mielparque Yokohama, Japan
Place of PublicationPiscataway, NJ.
PublisherIEEE
Pages158-162
Number of pages5
ISBN (Print)9781467387934
DOIs
Publication statusPublished - 23 May 2016
Event29th IEEE International Conference on Microelectronic Test Structures, ICMTS 2016 - Yokohama, Japan
Duration: 28 Mar 201631 Mar 2016

Conference

Conference29th IEEE International Conference on Microelectronic Test Structures, ICMTS 2016
CountryJapan
CityYokohama
Period28/03/1631/03/16

Keywords

  • microelectrodes
  • silicon compounds
  • silver
  • dielectrics
  • silicon

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