Abstract
This paper reports the design and application of test structures used for the development and characterisation of microelectrodes for operation in the harsh, caustic environment of molten salts operating at 450°C. These structures have been employed to evaluate the effect of electrode area and the dielectric integrity of insulating layers in the molten salt. This has been useful in identifying failures mechanisms, which has facilitated the optimisation of both the design and fabrication of the microelectrodes while at the same time also providing valuable information for process verification.
Original language | English |
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Title of host publication | 29th IEEE ICMTS Conference Proceedings |
Subtitle of host publication | March 28-31, Mielparque Yokohama, Japan |
Place of Publication | Piscataway, NJ. |
Publisher | IEEE |
Pages | 158-162 |
Number of pages | 5 |
ISBN (Print) | 9781467387934 |
DOIs | |
Publication status | Published - 23 May 2016 |
Event | 29th IEEE International Conference on Microelectronic Test Structures, ICMTS 2016 - Yokohama, Japan Duration: 28 Mar 2016 → 31 Mar 2016 |
Conference
Conference | 29th IEEE International Conference on Microelectronic Test Structures, ICMTS 2016 |
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Country/Territory | Japan |
City | Yokohama |
Period | 28/03/16 → 31/03/16 |
Keywords
- microelectrodes
- silicon compounds
- silver
- dielectrics
- silicon