Test structures for the characterisation of conductive carbon produced from photoresist

S. Scarfi, S. Smith, A. Tabasnikov, I. Schmuser, E. Blair, A. S. Bunting, A. J. Walton, A. F. Murray, J. G. Terry

Research output: Chapter in Book/Report/Conference proceedingConference contribution book

1 Citation (Scopus)

Abstract

Conductive carbon films are highly attractive for use as electrodes in electrochemistry and biosensing applications. Patterned photoresist films can be transformed into carbon electrodes using standard photolithographic techniques followed by pyrolysation of the photoresist in a furnace under a reducing atmosphere. Previous studies have been made of the electrical properties of blanket carbon films created using this method of fabrication. However, there is a need to investigate pattern dependent effects, particularly the extent to which the dimensions of the patterned films shrink during the high temperature processing. This study applies microfabricated test structures to the process characterisation of conductive carbon produced from standard positive photoresists.

LanguageEnglish
Title of host publication2016 29th IEEE International Conference on Microelectronic Test Structures, ICMTS 2016 - Conference Proceedings
Pages184-189
Number of pages6
Volume2016-May
ISBN (Electronic)9781467387934
DOIs
Publication statusPublished - 20 May 2016
Event29th IEEE International Conference on Microelectronic Test Structures, ICMTS 2016 - Yokohama, Japan
Duration: 28 Mar 201631 Mar 2016

Conference

Conference29th IEEE International Conference on Microelectronic Test Structures, ICMTS 2016
CountryJapan
CityYokohama
Period28/03/1631/03/16

Fingerprint

Photoresists
Carbon films
Carbon
Electrodes
Conductive films
Electrochemistry
Electric properties
Furnaces
Fabrication
Processing
Temperature

Keywords

  • biosensors
  • carbon
  • electrochemistry
  • microelectronic test structures
  • microsystems
  • electrodes
  • photoresists
  • biosensing applications

Cite this

Scarfi, S., Smith, S., Tabasnikov, A., Schmuser, I., Blair, E., Bunting, A. S., ... Terry, J. G. (2016). Test structures for the characterisation of conductive carbon produced from photoresist. In 2016 29th IEEE International Conference on Microelectronic Test Structures, ICMTS 2016 - Conference Proceedings (Vol. 2016-May, pp. 184-189). [7476204] https://doi.org/10.1109/ICMTS.2016.7476204
Scarfi, S. ; Smith, S. ; Tabasnikov, A. ; Schmuser, I. ; Blair, E. ; Bunting, A. S. ; Walton, A. J. ; Murray, A. F. ; Terry, J. G. / Test structures for the characterisation of conductive carbon produced from photoresist. 2016 29th IEEE International Conference on Microelectronic Test Structures, ICMTS 2016 - Conference Proceedings. Vol. 2016-May 2016. pp. 184-189
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Scarfi, S, Smith, S, Tabasnikov, A, Schmuser, I, Blair, E, Bunting, AS, Walton, AJ, Murray, AF & Terry, JG 2016, Test structures for the characterisation of conductive carbon produced from photoresist. in 2016 29th IEEE International Conference on Microelectronic Test Structures, ICMTS 2016 - Conference Proceedings. vol. 2016-May, 7476204, pp. 184-189, 29th IEEE International Conference on Microelectronic Test Structures, ICMTS 2016, Yokohama, Japan, 28/03/16. https://doi.org/10.1109/ICMTS.2016.7476204

Test structures for the characterisation of conductive carbon produced from photoresist. / Scarfi, S.; Smith, S.; Tabasnikov, A.; Schmuser, I.; Blair, E.; Bunting, A. S.; Walton, A. J.; Murray, A. F.; Terry, J. G.

2016 29th IEEE International Conference on Microelectronic Test Structures, ICMTS 2016 - Conference Proceedings. Vol. 2016-May 2016. p. 184-189 7476204.

Research output: Chapter in Book/Report/Conference proceedingConference contribution book

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Scarfi S, Smith S, Tabasnikov A, Schmuser I, Blair E, Bunting AS et al. Test structures for the characterisation of conductive carbon produced from photoresist. In 2016 29th IEEE International Conference on Microelectronic Test Structures, ICMTS 2016 - Conference Proceedings. Vol. 2016-May. 2016. p. 184-189. 7476204 https://doi.org/10.1109/ICMTS.2016.7476204