Abstract
Test structures were produced for optimizing the design and fabrication of a patterned solid polymer electrolyte in an electrochemical oxygen sensor. Measurements showed that choice of photoresist developer and the underlying insulator material affected durability of the polymer structures. Test electrodes covered by the polymer were effective at supporting electrochemical oxygen detection.
Original language | English |
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Title of host publication | 2017 International Conference of Microelectronic Test Structures (ICMTS) |
Place of Publication | Piscataway, N.J. |
Number of pages | 5 |
DOIs | |
Publication status | Published - 22 Jun 2017 |
Event | 2017 International Conference of Microelectronic Test Structures, ICMTS 2017 - Grenoble, France Duration: 27 Mar 2017 → 30 Mar 2017 |
Conference
Conference | 2017 International Conference of Microelectronic Test Structures, ICMTS 2017 |
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Country/Territory | France |
City | Grenoble |
Period | 27/03/17 → 30/03/17 |
Keywords
- test structures
- polymer electrolyte
- electrochemical oxygen detection