Test structures for optimizing polymer electrolyte performance in a microfabricated electrochemical oxygen sensor

J. R.K. Marland, C. Dunare, A. Tsiamis, E. González-Fernandez, E.O. Blair, S. Smith, J. G. Terry, A. F. Murray, A. J. Walton

Research output: Chapter in Book/Report/Conference proceedingConference contribution book

5 Citations (Scopus)
27 Downloads (Pure)

Abstract

Test structures were produced for optimizing the design and fabrication of a patterned solid polymer electrolyte in an electrochemical oxygen sensor. Measurements showed that choice of photoresist developer and the underlying insulator material affected durability of the polymer structures. Test electrodes covered by the polymer were effective at supporting electrochemical oxygen detection.

Original languageEnglish
Title of host publication2017 International Conference of Microelectronic Test Structures (ICMTS)
Place of PublicationPiscataway, N.J.
Number of pages5
DOIs
Publication statusPublished - 22 Jun 2017
Event2017 International Conference of Microelectronic Test Structures, ICMTS 2017 - Grenoble, France
Duration: 27 Mar 201730 Mar 2017

Conference

Conference2017 International Conference of Microelectronic Test Structures, ICMTS 2017
CountryFrance
CityGrenoble
Period27/03/1730/03/17

Keywords

  • test structures
  • polymer electrolyte
  • electrochemical oxygen detection

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