Test structures for characterising the silver chlorination process during integrated Ag/AgCl reference electrode fabrication

C. Dunare, J.R.K. Marland, E.O. Blair, A. Tsiamis, F. Moore, J.G. Terry, A.J. Walton, S. Smith

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Abstract

Robust and repeatable processes are required to fabricate reference electrodes for micro-scale integrated electrochemical sensors. One method for this is to produce a “silver/silver chloride” (Ag/Agel) electrode through chemical chlorination of a thin film silver layer. This paper presents test structures, which can electrically characterise the process to aid process development and in-line control of the chlorination process.
Original languageEnglish
Title of host publication2019 IEEE 32nd International Conference on Microelectronic Test Structures, ICMTS 2019
Place of PublicationPiscataway, NJ
PublisherIEEE
Pages58-63
Number of pages6
Volume2019-March
ISBN (Electronic)9781728114668
ISBN (Print)9781728114668, 9781728114644
DOIs
Publication statusPublished - 6 Jun 2019
Event32nd International Conference on Microelectronic Test Structures - Kitakyushu City, Fukuoka Prefecture, Japan
Duration: 18 Mar 201921 Mar 2019

Conference

Conference32nd International Conference on Microelectronic Test Structures
Abbreviated titleICMTS 2019
CountryJapan
CityKitakyushu City, Fukuoka Prefecture
Period18/03/1921/03/19

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Keywords

  • electrochemical Sensors
  • microfabrication
  • reference electrode
  • test structures

Cite this

Dunare, C., Marland, J. R. K., Blair, E. O., Tsiamis, A., Moore, F., Terry, J. G., ... Smith, S. (2019). Test structures for characterising the silver chlorination process during integrated Ag/AgCl reference electrode fabrication. In 2019 IEEE 32nd International Conference on Microelectronic Test Structures, ICMTS 2019 (Vol. 2019-March, pp. 58-63). Piscataway, NJ: IEEE. https://doi.org/10.1109/ICMTS.2019.8730966