Test structures for characterising the silver chlorination process during integrated Ag/AgCl reference electrode fabrication

C. Dunare; J.R.K. Marland; E.O. Blair; A. Tsiamis; F. Moore; J.G. Terry; A.J. Walton; S. Smith

doi:10.1109/ICMTS.2019.8730966

Test structures for characterising the silver chlorination process during integrated Ag/AgCl reference electrode fabrication

C. Dunare, J.R.K. Marland, E.O. Blair, A. Tsiamis, F. Moore, J.G. Terry, A.J. Walton, S. Smith

Biomedical Engineering

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution book

4 Citations (Scopus)

152 Downloads (Pure)

Abstract

Robust and repeatable processes are required to fabricate reference electrodes for micro-scale integrated electrochemical sensors. One method for this is to produce a “silver/silver chloride” (Ag/Agel) electrode through chemical chlorination of a thin film silver layer. This paper presents test structures, which can electrically characterise the process to aid process development and in-line control of the chlorination process.

Original language	English
Title of host publication	2019 IEEE 32nd International Conference on Microelectronic Test Structures, ICMTS 2019
Place of Publication	Piscataway, NJ
Publisher	IEEE
Pages	58-63
Number of pages	6
Volume	2019-March
ISBN (Electronic)	9781728114668
ISBN (Print)	9781728114668, 9781728114644
DOIs	https://doi.org/10.1109/ICMTS.2019.8730966
Publication status	Published - 6 Jun 2019
Event	32nd International Conference on Microelectronic Test Structures - Kitakyushu City, Fukuoka Prefecture, Japan Duration: 18 Mar 2019 → 21 Mar 2019

Conference

Conference	32nd International Conference on Microelectronic Test Structures
Abbreviated title	ICMTS 2019
Country/Territory	Japan
City	Kitakyushu City, Fukuoka Prefecture
Period	18/03/19 → 21/03/19

Keywords

electrochemical Sensors
microfabrication
reference electrode
test structures

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10.1109/ICMTS.2019.8730966

Dunare-etal-ICMTS2019-Test-structures-for-characterising-the-silver-chlorination-processAccepted author manuscript, 7.09 MB

Cite this

Dunare, C., Marland, J. R. K., Blair, E. O., Tsiamis, A., Moore, F., Terry, J. G., Walton, A. J., & Smith, S. (2019). Test structures for characterising the silver chlorination process during integrated Ag/AgCl reference electrode fabrication. In 2019 IEEE 32nd International Conference on Microelectronic Test Structures, ICMTS 2019 (Vol. 2019-March, pp. 58-63). IEEE. https://doi.org/10.1109/ICMTS.2019.8730966

@inproceedings{08b0150f5a1e4d94af274c2f0a0b53a8,

title = "Test structures for characterising the silver chlorination process during integrated Ag/AgCl reference electrode fabrication",

abstract = "Robust and repeatable processes are required to fabricate reference electrodes for micro-scale integrated electrochemical sensors. One method for this is to produce a “silver/silver chloride” (Ag/Agel) electrode through chemical chlorination of a thin film silver layer. This paper presents test structures, which can electrically characterise the process to aid process development and in-line control of the chlorination process.",

keywords = "electrochemical Sensors, microfabrication, reference electrode, test structures",

author = "C. Dunare and J.R.K. Marland and E.O. Blair and A. Tsiamis and F. Moore and J.G. Terry and A.J. Walton and S. Smith",

note = "{\textcopyright} 2019 IEEE. Personal use of this material is permitted. Permission from IEEE must be obtained for all other uses, in any current or future media, including reprinting/republishing this material for advertising or promotional purposes, creating new collective works, for resale or redistribution to servers or lists, or reuse of any copyrighted component of this work in other works.; 32nd International Conference on Microelectronic Test Structures, ICMTS 2019 ; Conference date: 18-03-2019 Through 21-03-2019",

year = "2019",

month = jun,

day = "6",

doi = "10.1109/ICMTS.2019.8730966",

language = "English",

isbn = "9781728114668",

volume = "2019-March",

pages = "58--63",

booktitle = "2019 IEEE 32nd International Conference on Microelectronic Test Structures, ICMTS 2019",

publisher = "IEEE",

}

Dunare, C, Marland, JRK, Blair, EO, Tsiamis, A, Moore, F, Terry, JG, Walton, AJ & Smith, S 2019, Test structures for characterising the silver chlorination process during integrated Ag/AgCl reference electrode fabrication. in 2019 IEEE 32nd International Conference on Microelectronic Test Structures, ICMTS 2019. vol. 2019-March, IEEE, Piscataway, NJ, pp. 58-63, 32nd International Conference on Microelectronic Test Structures, Kitakyushu City, Fukuoka Prefecture, Japan, 18/03/19. https://doi.org/10.1109/ICMTS.2019.8730966

Test structures for characterising the silver chlorination process during integrated Ag/AgCl reference electrode fabrication. / Dunare, C.; Marland, J.R.K.; Blair, E.O. et al.
2019 IEEE 32nd International Conference on Microelectronic Test Structures, ICMTS 2019. Vol. 2019-March Piscataway, NJ: IEEE, 2019. p. 58-63.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution book

TY - GEN

T1 - Test structures for characterising the silver chlorination process during integrated Ag/AgCl reference electrode fabrication

AU - Dunare, C.

AU - Marland, J.R.K.

AU - Blair, E.O.

AU - Tsiamis, A.

AU - Moore, F.

AU - Terry, J.G.

AU - Walton, A.J.

AU - Smith, S.

N1 - © 2019 IEEE. Personal use of this material is permitted. Permission from IEEE must be obtained for all other uses, in any current or future media, including reprinting/republishing this material for advertising or promotional purposes, creating new collective works, for resale or redistribution to servers or lists, or reuse of any copyrighted component of this work in other works.

PY - 2019/6/6

Y1 - 2019/6/6

N2 - Robust and repeatable processes are required to fabricate reference electrodes for micro-scale integrated electrochemical sensors. One method for this is to produce a “silver/silver chloride” (Ag/Agel) electrode through chemical chlorination of a thin film silver layer. This paper presents test structures, which can electrically characterise the process to aid process development and in-line control of the chlorination process.

AB - Robust and repeatable processes are required to fabricate reference electrodes for micro-scale integrated electrochemical sensors. One method for this is to produce a “silver/silver chloride” (Ag/Agel) electrode through chemical chlorination of a thin film silver layer. This paper presents test structures, which can electrically characterise the process to aid process development and in-line control of the chlorination process.

KW - electrochemical Sensors

KW - microfabrication

KW - reference electrode

KW - test structures

UR - https://www.research.ed.ac.uk/portal/en/publications/test-structures-for-characterising-the-silver-chlorination-process-during-integrated-agagcl-reference-electrode-fabrication(0b0ab3ca-d604-4baa-a1ab-04e996f960e7).html

U2 - 10.1109/ICMTS.2019.8730966

DO - 10.1109/ICMTS.2019.8730966

M3 - Conference contribution book

SN - 9781728114668

SN - 9781728114644

VL - 2019-March

SP - 58

EP - 63

BT - 2019 IEEE 32nd International Conference on Microelectronic Test Structures, ICMTS 2019

PB - IEEE

CY - Piscataway, NJ

T2 - 32nd International Conference on Microelectronic Test Structures

Y2 - 18 March 2019 through 21 March 2019

ER -

Dunare C, Marland JRK, Blair EO, Tsiamis A, Moore F, Terry JG et al. Test structures for characterising the silver chlorination process during integrated Ag/AgCl reference electrode fabrication. In 2019 IEEE 32nd International Conference on Microelectronic Test Structures, ICMTS 2019. Vol. 2019-March. Piscataway, NJ: IEEE. 2019. p. 58-63 doi: 10.1109/ICMTS.2019.8730966

Test structures for characterising the silver chlorination process during integrated Ag/AgCl reference electrode fabrication

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Keywords

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