Test structures for characterising the silver chlorination process during integrated Ag/AgCl reference electrode fabrication

C. Dunare, J.R.K. Marland, E.O. Blair, A. Tsiamis, F. Moore, J.G. Terry, A.J. Walton, S. Smith

Research output: Chapter in Book/Report/Conference proceedingConference contribution book

2 Citations (Scopus)
56 Downloads (Pure)

Abstract

Robust and repeatable processes are required to fabricate reference electrodes for micro-scale integrated electrochemical sensors. One method for this is to produce a “silver/silver chloride” (Ag/Agel) electrode through chemical chlorination of a thin film silver layer. This paper presents test structures, which can electrically characterise the process to aid process development and in-line control of the chlorination process.
Original languageEnglish
Title of host publication2019 IEEE 32nd International Conference on Microelectronic Test Structures, ICMTS 2019
Place of PublicationPiscataway, NJ
PublisherIEEE
Pages58-63
Number of pages6
Volume2019-March
ISBN (Electronic)9781728114668
ISBN (Print)9781728114668, 9781728114644
DOIs
Publication statusPublished - 6 Jun 2019
Event32nd International Conference on Microelectronic Test Structures - Kitakyushu City, Fukuoka Prefecture, Japan
Duration: 18 Mar 201921 Mar 2019

Conference

Conference32nd International Conference on Microelectronic Test Structures
Abbreviated titleICMTS 2019
CountryJapan
CityKitakyushu City, Fukuoka Prefecture
Period18/03/1921/03/19

Keywords

  • electrochemical Sensors
  • microfabrication
  • reference electrode
  • test structures

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