This paper presents a complete test structure and characterisation system for the evaluation of nanoelectrode technology. It integrates microfabricated nanoelectrodes for electrochemical measurements, 3D printing and surface tensionconfined microfluidics. This system exploits the inherent analytical advantages of nanoelectrodes that enables their operation with small volume samples, which has potential applications for onwafer measurements.
|Title of host publication||2020 IEEE 33rd International Conference on Microelectronic Test Structures (ICMTS)|
|Place of Publication||Piscataway, N.J.|
|Number of pages||6|
|Publication status||Published - 4 Jun 2020|
- microfabricated nanoelectrodes
- 3D printing technology