Test structure and measurement system for characterising the electrochemical performance of nanoelectrode structures

Ilka Schmueser, Ewen O. Blair, Ziya Isiksacan, Yifan Li, Damion K. Corrigan, Adam A. Stokes, Jonathan G. Terry, Andrew R. Mount, Anthony J. Walton

Research output: Chapter in Book/Report/Conference proceedingConference contribution book

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Abstract

This paper presents a complete test structure and characterisation system for the evaluation of nanoelectrode technology. It integrates microfabricated nanoelectrodes for electrochemical measurements, 3D printing and surface tensionconfined microfluidics. This system exploits the inherent analytical advantages of nanoelectrodes that enables their operation with small volume samples, which has potential applications for onwafer measurements.
Original languageEnglish
Title of host publication2020 IEEE 33rd International Conference on Microelectronic Test Structures (ICMTS)
Place of PublicationPiscataway, N.J.
PublisherIEEE
Number of pages6
ISBN (Electronic)978-1-7281-4008-7
ISBN (Print)978-1-7281-4009-4
DOIs
Publication statusPublished - 4 Jun 2020

Keywords

  • nanoelectrodes
  • microfabricated nanoelectrodes
  • 3D printing technology

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