Temperature Gradient in Microfabricated Sensor Cavity

Roozbeh Parsa (Inventor), Iouri N. Mirgorodski (Inventor), William French (Inventor), Nathan Brockie (Inventor), Ann Gabrys (Inventor), Terry Dyer (Inventor)

Research output: Patent


A microfabricated sensor includes a sensor cell with a cell body and a window attached to the cell body. A sensor cavity containing sensor fluid material is located in cell body, open to the window. A signal path extends from a signal emitter outside the sensor cell, through the window and sensor cavity, and to a signal detector. The sensor cell may have an asymmetric thermal configuration, conducive to developing a temperature gradient in the sensor cell. One or more heaters are disposed on the sensor cell, possibly in an asymmetric configuration. Power is applied to the heaters, possibly asymmetrically, so as to develop a temperature gradient in the sensor cell with a low temperature region in the sensor cell, sufficient to condense the sensor fluid in the low temperature region, outside of the signal path.
Original languageEnglish
Patent numberUS20180038921A1
IPC G01R 33/26 (20060101); H03L 7/26 (20060101); G04F 5/14 (20060101)
Publication statusPublished - 8 Feb 2018


  • measuring magnetic variables
  • magnetic fields
  • magnetic flux
  • optical pumping


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