Subwavelength grating Bragg grating filters in silicon-on-insulator

J. Wang; I. Glesk; L. R. Chen

doi:10.1049/el.2015.0546

Subwavelength grating Bragg grating filters in silicon-on-insulator

J. Wang, I. Glesk, L. R. Chen

Electronic And Electrical Engineering

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Abstract

Narrowband filters based on Bragg gratings (BGs) in subwavelength grating (SWG) waveguides in silicon-on-insulator are reported. The SWG BGs are fabricated using electron beam lithography with a single etch. For SWG BGs 1.12 mm in length, the measured 3 dB bandwidths are ~ 0.5 nm and have a peak reflectivity as high as 94.4% in the C-band.

Original language	English
Pages (from-to)	712-714
Number of pages	3
Journal	Electronics Letters
Volume	51
Issue number	9
DOIs	https://doi.org/10.1049/el.2015.0546
Publication status	Published - 30 Apr 2015

Keywords

Bragg gratings
subwavelength grating
waveguides
silicon-on-insulator
electron beam lithography

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10.1049/el.2015.0546

Wang-etal-EL2015-Subwavelength-grating-Bragg-grating-filtersAccepted author manuscript, 602 KB

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title = "Subwavelength grating Bragg grating filters in silicon-on-insulator",

abstract = "Narrowband filters based on Bragg gratings (BGs) in subwavelength grating (SWG) waveguides in silicon-on-insulator are reported. The SWG BGs are fabricated using electron beam lithography with a single etch. For SWG BGs 1.12 mm in length, the measured 3 dB bandwidths are \textasciitilde{} 0.5 nm and have a peak reflectivity as high as 94.4\% in the C-band. ",

keywords = "Bragg gratings , subwavelength grating , waveguides , silicon-on-insulator, electron beam lithography",

author = "J. Wang and I. Glesk and Chen, \{L. R.\}",

note = " This paper is a postprint of a paper submitted to and accepted for publication in Electronics Letters and is subject to Institution of Engineering and Technology Copyright. The copy of record is available at IET Digital Library.",

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language = "English",

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T1 - Subwavelength grating Bragg grating filters in silicon-on-insulator

AU - Wang, J.

AU - Glesk, I.

AU - Chen, L. R.

N1 - This paper is a postprint of a paper submitted to and accepted for publication in Electronics Letters and is subject to Institution of Engineering and Technology Copyright. The copy of record is available at IET Digital Library.

PY - 2015/4/30

Y1 - 2015/4/30

N2 - Narrowband filters based on Bragg gratings (BGs) in subwavelength grating (SWG) waveguides in silicon-on-insulator are reported. The SWG BGs are fabricated using electron beam lithography with a single etch. For SWG BGs 1.12 mm in length, the measured 3 dB bandwidths are ~ 0.5 nm and have a peak reflectivity as high as 94.4% in the C-band.

AB - Narrowband filters based on Bragg gratings (BGs) in subwavelength grating (SWG) waveguides in silicon-on-insulator are reported. The SWG BGs are fabricated using electron beam lithography with a single etch. For SWG BGs 1.12 mm in length, the measured 3 dB bandwidths are ~ 0.5 nm and have a peak reflectivity as high as 94.4% in the C-band.

KW - Bragg gratings

KW - subwavelength grating

KW - waveguides

KW - silicon-on-insulator

KW - electron beam lithography

UR - http://digital-library.theiet.org/content/journals/10.1049/el.2015.0546

UR - http://digital-library.theiet.org/content/journals/el

U2 - 10.1049/el.2015.0546

DO - 10.1049/el.2015.0546

M3 - Article

SN - 0013-5194

VL - 51

SP - 712

EP - 714

JO - Electronics Letters

JF - Electronics Letters

IS - 9

ER -

Subwavelength grating Bragg grating filters in silicon-on-insulator

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