Sub-micron-accuracy automated position and rotation registration method for transferred devices

Research output: Chapter in Book/Report/Conference proceedingConference contribution book

2 Citations (Scopus)
9 Downloads (Pure)

Abstract

We demonstrate a high accuracy and throughput automated method for the spatial registration of micron-scale devices on planar chips. The system is used to assess the yield, spatial pitch and rotation of mass transfer-printed membrane devices (here micro-LEDs for illustration) using simple optical microscopy tools.
Original languageEnglish
Title of host publication2021 IEEE Photonics Conference
Place of PublicationPiscataway, NJ
PublisherIEEE
Pages978-979
Number of pages2
ISBN (Electronic)9781665416016
ISBN (Print)9781665446761
DOIs
Publication statusPublished - 12 Nov 2021
EventIEEE Photonics Conference: IPC 2021 - Virtual
Duration: 18 Oct 202121 Oct 2021
https://ieee-ipc.org/

Publication series

NameIEEE Photonics Conference
PublisherIEEE
ISSN (Print)2374-0140
ISSN (Electronic)2575-274X

Conference

ConferenceIEEE Photonics Conference
Abbreviated titleIPC2021
Period18/10/2121/10/21
Internet address

Keywords

  • semiconductor device measurement
  • optical microscopy
  • light emitting diodes
  • spatial pitch
  • light emitting diode
  • mass transfer
  • yield
  • accuracy
  • inspection method
  • integrated devices

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