Sub-micron-accuracy automated position and rotation registration method for transferred devices

Eleni Margariti; Benoit Guilhabert; Dimitars Jevtics; Martin D. Dawson; Michael J. Strain

doi:10.1109/IPC48725.2021.9592935

Sub-micron-accuracy automated position and rotation registration method for transferred devices

Eleni Margariti, Benoit Guilhabert, Dimitars Jevtics, Martin D. Dawson, Michael J. Strain

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution book

2 Citations (Scopus)

26 Downloads (Pure)

Abstract

We demonstrate a high accuracy and throughput automated method for the spatial registration of micron-scale devices on planar chips. The system is used to assess the yield, spatial pitch and rotation of mass transfer-printed membrane devices (here micro-LEDs for illustration) using simple optical microscopy tools.

Original language	English
Title of host publication	2021 IEEE Photonics Conference
Place of Publication	Piscataway, NJ
Publisher	IEEE
Pages	978-979
Number of pages	2
ISBN (Electronic)	9781665416016
ISBN (Print)	9781665446761
DOIs	https://doi.org/10.1109/IPC48725.2021.9592935
Publication status	Published - 12 Nov 2021
Event	IEEE Photonics Conference: IPC 2021 - Virtual Duration: 18 Oct 2021 → 21 Oct 2021 https://ieee-ipc.org/

Publication series

Name	IEEE Photonics Conference
Publisher	IEEE
ISSN (Print)	2374-0140
ISSN (Electronic)	2575-274X

Conference

Conference	IEEE Photonics Conference
Abbreviated title	IPC2021
Period	18/10/21 → 21/10/21
Internet address	https://ieee-ipc.org/

Keywords

semiconductor device measurement
optical microscopy
light emitting diodes
spatial pitch
light emitting diode
mass transfer
yield
accuracy
inspection method
integrated devices

Access to Document

10.1109/IPC48725.2021.9592935

Margariti-etal-IEEEPC-2021-Sub-micron-accuracy-automated-position-and-rotation-registration-methodAccepted author manuscript, 1 MBLicence: Strath_1

'Hetero-print': A holistic approach to transfer-printing for heterogeneous integration in manufacturing
Dawson, M. (Principal Investigator), Martin, R. (Co-investigator), Strain, M. (Co-investigator), Watson, I. (Co-investigator) & Guilhabert, B. J. E. (Research Co-investigator)
EPSRC (Engineering and Physical Sciences Research Council)
1/06/18 → 31/05/24
Project: Research

Data for: ''Sub-micron-accuracy automated position and rotation registration method for transferred devices''
Margariti, E. (Creator), Guilhabert, B. J. E. (Contributor), Jevtics, D. (Contributor), Strain, M. (Contributor) & Dawson, M. (Contributor), University of Strathclyde, 14 Jul 2021
DOI: 10.15129/e094b2d2-151a-42c0-85f2-fda1ed8553ee, https://ieee-ipc.org/
Dataset

Cite this

@inproceedings{19379b30b1e949029535e02528852ba7,

title = "Sub-micron-accuracy automated position and rotation registration method for transferred devices",

abstract = "We demonstrate a high accuracy and throughput automated method for the spatial registration of micron-scale devices on planar chips. The system is used to assess the yield, spatial pitch and rotation of mass transfer-printed membrane devices (here micro-LEDs for illustration) using simple optical microscopy tools.",

keywords = "semiconductor device measurement, optical microscopy, light emitting diodes, spatial pitch, light emitting diode, mass transfer, yield, accuracy, inspection method, integrated devices",

author = "Eleni Margariti and Benoit Guilhabert and Dimitars Jevtics and Dawson, {Martin D.} and Strain, {Michael J.}",

note = "{\textcopyright} 2021 IEEE. Personal use of this material is permitted. Permission from IEEE must be obtained for all other uses, in any current or future media, including reprinting /republishing this material for advertising or promotional purposes, creating new collective works, for resale or redistribution to servers or lists, or reuse of any copyrighted component of this work in other works.; IEEE Photonics Conference : IPC 2021, IPC2021 ; Conference date: 18-10-2021 Through 21-10-2021",

year = "2021",

month = nov,

day = "12",

doi = "10.1109/IPC48725.2021.9592935",

language = "English",

isbn = "9781665446761",

series = "IEEE Photonics Conference",

publisher = "IEEE",

pages = "978--979",

booktitle = "2021 IEEE Photonics Conference",

url = "https://ieee-ipc.org/",

}

TY - GEN

T1 - Sub-micron-accuracy automated position and rotation registration method for transferred devices

AU - Margariti, Eleni

AU - Guilhabert, Benoit

AU - Jevtics, Dimitars

AU - Dawson, Martin D.

AU - Strain, Michael J.

N1 - © 2021 IEEE. Personal use of this material is permitted. Permission from IEEE must be obtained for all other uses, in any current or future media, including reprinting /republishing this material for advertising or promotional purposes, creating new collective works, for resale or redistribution to servers or lists, or reuse of any copyrighted component of this work in other works.

PY - 2021/11/12

Y1 - 2021/11/12

N2 - We demonstrate a high accuracy and throughput automated method for the spatial registration of micron-scale devices on planar chips. The system is used to assess the yield, spatial pitch and rotation of mass transfer-printed membrane devices (here micro-LEDs for illustration) using simple optical microscopy tools.

AB - We demonstrate a high accuracy and throughput automated method for the spatial registration of micron-scale devices on planar chips. The system is used to assess the yield, spatial pitch and rotation of mass transfer-printed membrane devices (here micro-LEDs for illustration) using simple optical microscopy tools.

KW - semiconductor device measurement

KW - optical microscopy

KW - light emitting diodes

KW - spatial pitch

KW - light emitting diode

KW - mass transfer

KW - yield

KW - accuracy

KW - inspection method

KW - integrated devices

U2 - 10.1109/IPC48725.2021.9592935

DO - 10.1109/IPC48725.2021.9592935

M3 - Conference contribution book

SN - 9781665446761

T3 - IEEE Photonics Conference

SP - 978

EP - 979

BT - 2021 IEEE Photonics Conference

PB - IEEE

CY - Piscataway, NJ

T2 - IEEE Photonics Conference

Y2 - 18 October 2021 through 21 October 2021

ER -

Sub-micron-accuracy automated position and rotation registration method for transferred devices

Abstract

Publication series

Conference

Keywords

Access to Document

Fingerprint

Projects

'Hetero-print': A holistic approach to transfer-printing for heterogeneous integration in manufacturing

Datasets

Data for: ''Sub-micron-accuracy automated position and rotation registration method for transferred devices''

Cite this