Study of scratch drive actuator force characteristics

L. Li; J.G. Brown; D.G. Uttamchandani

doi:10.1088/0960-1317/12/6/303

Study of scratch drive actuator force characteristics

L. Li, J.G. Brown, D.G. Uttamchandani

Electronic And Electrical Engineering

Research output: Contribution to journal › Article › peer-review

32 Citations (Scopus)

Abstract

Microactuators are one of the key components in MEMS technology, and various designs have been realized through different fabrication processes. One type of microactuator commonly used is the scratch drive actuator (SDA) that is frequently fabricated by surface micromachining processes. An experimental investigation has been conducted on the force characteristics of SDAs fabricated using the JDSU Microsystems MUMPs process. One-, two-, three- and four-plate SDAs connected to box-springs have been designed and fabricated for these experiments using MUMPs run 44. The spring constant for the box-springs has been calculated by FEM using ANSYS software. The product of the spring constant and spring extension is used to measure the forces produced by these SDAs. It is estimated that the forces produced exceed 250 μN from a one-plate SDA and 850 μN from a four-plate SDA.

Original language	English
Pages (from-to)	736-741
Number of pages	5
Journal	Journal of Micromechanics and Microengineering
Volume	12
Issue number	6
DOIs	https://doi.org/10.1088/0960-1317/12/6/303
Publication status	Published - Nov 2002

Keywords

actuator force
microactuators
MEMS
scratch drive actuator
control systems

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10.1088/0960-1317/12/6/303

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title = "Study of scratch drive actuator force characteristics",

abstract = "Microactuators are one of the key components in MEMS technology, and various designs have been realized through different fabrication processes. One type of microactuator commonly used is the scratch drive actuator (SDA) that is frequently fabricated by surface micromachining processes. An experimental investigation has been conducted on the force characteristics of SDAs fabricated using the JDSU Microsystems MUMPs process. One-, two-, three- and four-plate SDAs connected to box-springs have been designed and fabricated for these experiments using MUMPs run 44. The spring constant for the box-springs has been calculated by FEM using ANSYS software. The product of the spring constant and spring extension is used to measure the forces produced by these SDAs. It is estimated that the forces produced exceed 250 μN from a one-plate SDA and 850 μN from a four-plate SDA.",

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T1 - Study of scratch drive actuator force characteristics

AU - Li, L.

AU - Brown, J.G.

AU - Uttamchandani, D.G.

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N2 - Microactuators are one of the key components in MEMS technology, and various designs have been realized through different fabrication processes. One type of microactuator commonly used is the scratch drive actuator (SDA) that is frequently fabricated by surface micromachining processes. An experimental investigation has been conducted on the force characteristics of SDAs fabricated using the JDSU Microsystems MUMPs process. One-, two-, three- and four-plate SDAs connected to box-springs have been designed and fabricated for these experiments using MUMPs run 44. The spring constant for the box-springs has been calculated by FEM using ANSYS software. The product of the spring constant and spring extension is used to measure the forces produced by these SDAs. It is estimated that the forces produced exceed 250 μN from a one-plate SDA and 850 μN from a four-plate SDA.

AB - Microactuators are one of the key components in MEMS technology, and various designs have been realized through different fabrication processes. One type of microactuator commonly used is the scratch drive actuator (SDA) that is frequently fabricated by surface micromachining processes. An experimental investigation has been conducted on the force characteristics of SDAs fabricated using the JDSU Microsystems MUMPs process. One-, two-, three- and four-plate SDAs connected to box-springs have been designed and fabricated for these experiments using MUMPs run 44. The spring constant for the box-springs has been calculated by FEM using ANSYS software. The product of the spring constant and spring extension is used to measure the forces produced by these SDAs. It is estimated that the forces produced exceed 250 μN from a one-plate SDA and 850 μN from a four-plate SDA.

KW - actuator force

KW - microactuators

KW - MEMS

KW - scratch drive actuator

KW - control systems

UR - http://dx.doi.org/10.1088/0960-1317/12/6/303

U2 - 10.1088/0960-1317/12/6/303

DO - 10.1088/0960-1317/12/6/303

M3 - Article

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VL - 12

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EP - 741

JO - Journal of Micromechanics and Microengineering

JF - Journal of Micromechanics and Microengineering

IS - 6

ER -

Study of scratch drive actuator force characteristics

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Keywords

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