Study of a high efficiency optical MEMS transducer for the generation of narrowband laser ultrasound

Xuesheng Chen, Theodosia Stratoudaki, Steve D Sharples, Matt Clark

Research output: Contribution to journalArticle

1 Citation (Scopus)

Abstract

In this paper we demonstrate an optically powered ultrasonic t ransducer. It has a high efficiency and was designed and fabricated using MEMS (microelectromechanical system) techniques. It can generate narrowband ultrasound from broadband laser excitation. It is a simple two-mask-level MEMS device with a micro-disc seated on a micro-stem. As a laser pulse is incident on the disc centre, the disc is excited into a 'flapping' motion because of the thermomechanical interaction between the absorbing and non-absorbing parts of the disc. This flapping motion is dominated by one of the resonances of the disc, coupling a narrowband longitudinal bulk wave propagating along the axis of the micro-stem into the sample. Experiments with these transducers have shown that narrowband ultrasonic waves with a high SNR (signal to noise ratio) were generated successfully. The device is simple to excite optically and generates higher amplitudes than by normal thermoelastic generation. No physical contact is required to excite the transducer, making it suitable for remote non-contact ultrasonic applications.

LanguageEnglish
Article number012103
Pages1-6
Number of pages6
JournalJournal of Physics: Conference Series
Volume214
Issue number1
DOIs
Publication statusPublished - 2010
Externally publishedYes

Fingerprint

microelectromechanical systems
narrowband
transducers
flapping
lasers
stems
ultrasonics
ultrasonic radiation
signal to noise ratios
masks
broadband
pulses
excitation
interactions

Cite this

@article{9d6d1ac985204c7189c04b046166c558,
title = "Study of a high efficiency optical MEMS transducer for the generation of narrowband laser ultrasound",
abstract = "In this paper we demonstrate an optically powered ultrasonic t ransducer. It has a high efficiency and was designed and fabricated using MEMS (microelectromechanical system) techniques. It can generate narrowband ultrasound from broadband laser excitation. It is a simple two-mask-level MEMS device with a micro-disc seated on a micro-stem. As a laser pulse is incident on the disc centre, the disc is excited into a 'flapping' motion because of the thermomechanical interaction between the absorbing and non-absorbing parts of the disc. This flapping motion is dominated by one of the resonances of the disc, coupling a narrowband longitudinal bulk wave propagating along the axis of the micro-stem into the sample. Experiments with these transducers have shown that narrowband ultrasonic waves with a high SNR (signal to noise ratio) were generated successfully. The device is simple to excite optically and generates higher amplitudes than by normal thermoelastic generation. No physical contact is required to excite the transducer, making it suitable for remote non-contact ultrasonic applications.",
author = "Xuesheng Chen and Theodosia Stratoudaki and Sharples, {Steve D} and Matt Clark",
year = "2010",
doi = "10.1088/1742-6596/214/1/012103",
language = "English",
volume = "214",
pages = "1--6",
journal = "Journal of Physics: Conference Series",
issn = "1742-6588",
number = "1",

}

Study of a high efficiency optical MEMS transducer for the generation of narrowband laser ultrasound. / Chen, Xuesheng; Stratoudaki, Theodosia; Sharples, Steve D; Clark, Matt.

In: Journal of Physics: Conference Series , Vol. 214, No. 1, 012103, 2010, p. 1-6.

Research output: Contribution to journalArticle

TY - JOUR

T1 - Study of a high efficiency optical MEMS transducer for the generation of narrowband laser ultrasound

AU - Chen, Xuesheng

AU - Stratoudaki, Theodosia

AU - Sharples, Steve D

AU - Clark, Matt

PY - 2010

Y1 - 2010

N2 - In this paper we demonstrate an optically powered ultrasonic t ransducer. It has a high efficiency and was designed and fabricated using MEMS (microelectromechanical system) techniques. It can generate narrowband ultrasound from broadband laser excitation. It is a simple two-mask-level MEMS device with a micro-disc seated on a micro-stem. As a laser pulse is incident on the disc centre, the disc is excited into a 'flapping' motion because of the thermomechanical interaction between the absorbing and non-absorbing parts of the disc. This flapping motion is dominated by one of the resonances of the disc, coupling a narrowband longitudinal bulk wave propagating along the axis of the micro-stem into the sample. Experiments with these transducers have shown that narrowband ultrasonic waves with a high SNR (signal to noise ratio) were generated successfully. The device is simple to excite optically and generates higher amplitudes than by normal thermoelastic generation. No physical contact is required to excite the transducer, making it suitable for remote non-contact ultrasonic applications.

AB - In this paper we demonstrate an optically powered ultrasonic t ransducer. It has a high efficiency and was designed and fabricated using MEMS (microelectromechanical system) techniques. It can generate narrowband ultrasound from broadband laser excitation. It is a simple two-mask-level MEMS device with a micro-disc seated on a micro-stem. As a laser pulse is incident on the disc centre, the disc is excited into a 'flapping' motion because of the thermomechanical interaction between the absorbing and non-absorbing parts of the disc. This flapping motion is dominated by one of the resonances of the disc, coupling a narrowband longitudinal bulk wave propagating along the axis of the micro-stem into the sample. Experiments with these transducers have shown that narrowband ultrasonic waves with a high SNR (signal to noise ratio) were generated successfully. The device is simple to excite optically and generates higher amplitudes than by normal thermoelastic generation. No physical contact is required to excite the transducer, making it suitable for remote non-contact ultrasonic applications.

UR - http://www.scopus.com/inward/record.url?scp=77950638638&partnerID=8YFLogxK

U2 - 10.1088/1742-6596/214/1/012103

DO - 10.1088/1742-6596/214/1/012103

M3 - Article

VL - 214

SP - 1

EP - 6

JO - Journal of Physics: Conference Series

T2 - Journal of Physics: Conference Series

JF - Journal of Physics: Conference Series

SN - 1742-6588

IS - 1

M1 - 012103

ER -