Abstract
Polycrystalline lithium fluoride thin films have a number of existing and potential uses, but the optimization of their microstructure has not yet been addressed systematically. We have developed a means of measuring the porosity in LiF films, and a method for performing detailed electron-microscopical studies on this normally beam-sensitive material. These techniques have been applied to assess the structure of LiF films immediately after deposition from the vapor phase, and also after subsequent annealing.
Original language | English |
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Pages | 351-356 |
Number of pages | 6 |
Publication status | Published - 1 Dec 2005 |
Event | 2005 Materials Research Society Spring Meeting - San Francisco, CA, United States Duration: 28 Mar 2005 → 1 Apr 2005 |
Conference
Conference | 2005 Materials Research Society Spring Meeting |
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Country/Territory | United States |
City | San Francisco, CA |
Period | 28/03/05 → 1/04/05 |
Keywords
- thin films
- annealing
- lithium compounds
- polycrystalline materials
- lithium fluoride thin films