Abstract
The versatility of e-beam characterisation of semiconductor materials is emphasised by describing work on a range of samples: a GaAs-AlGaAs multiple quantum well, a strained ZnSe epilayer, and a porous silicon overlayer on bulk silicon.
Original language | English |
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Pages (from-to) | 319-324 |
Number of pages | 6 |
Journal | Physica B: Physics of Condensed Matter |
Volume | 185 |
Issue number | 1-4 |
DOIs | |
Publication status | Published - 1 Apr 1993 |
Keywords
- semiconductor materials
- quantum wells
- porus silicon