SOI based electromagnetic MEMS scanners and their applications in laser systems

G. Brown, R. Bauer, W. Lubeigt, D. Uttamchandani

Research output: Chapter in Book/Report/Conference proceedingConference contribution book

2 Citations (Scopus)

Abstract

MEMS scanners are of interest for their potential as low-cost, low operating power devices for use in various photonic systems. The devices reported here are actuated by the electromagnetic force between a static external magnetic field and a current flowing through an SOI MEMS scanner. These scanners have several modes of operation: their mirrors may be rotated and maintained at a static angle (up to ± 1.4 degrees), scanned rapidly (up to 500 Hz); or may be operated in a resonance mode, at the device's mechanical resonance frequency (∼1.2 kHz) for higher rate scanning. The use of these scanners as a Q-switching element within a Nd:YAG laser cavity has been demonstrated. Pulse durations of 400 ns were obtained with a pulse energy of 58 μJ and a pulse peak power of 145 W. The use of an external magnetic field, generated by compact rare-earth magnets, allows a simple and cost-effective commercial fabrication process to be employed (the multi-user SOI process provided by MEMSCAP Inc) and avoids the requirement to deposit magnetic materials on the MEMS structure.
LanguageEnglish
Title of host publicationMoems and Miniaturized Systems XII
EditorsW. Piyawattanametha, Y.H Park
Place of PublicationBellingham
DOIs
Publication statusPublished - 12 Jun 2013
EventConference on MOEMS and Miniaturized Systems XII - San Francisco, United States
Duration: 4 Feb 20136 Feb 2013

Publication series

NameProceedings of SPIE
PublisherSPIE
Volume8616
ISSN (Print)0277-786X

Conference

ConferenceConference on MOEMS and Miniaturized Systems XII
CountryUnited States
CitySan Francisco
Period4/02/136/02/13

Fingerprint

SOI (semiconductors)
Scanner
Micro-electro-mechanical Systems
scanners
microelectromechanical systems
MEMS
electromagnetism
Laser
Lasers
Magnetic fields
External Field
Q switching
lasers
Laser resonators
Magnetic Field
Magnetic materials
Q-switching
Electromagnetic Force
resonant vibration
switching circuits

Keywords

  • electromagnetic
  • intra-cavity
  • laser
  • MEMS
  • multi-user
  • Q-switch
  • scanner
  • SOI

Cite this

Brown, G., Bauer, R., Lubeigt, W., & Uttamchandani, D. (2013). SOI based electromagnetic MEMS scanners and their applications in laser systems. In W. Piyawattanametha, & Y. H. Park (Eds.), Moems and Miniaturized Systems XII [86160G] (Proceedings of SPIE; Vol. 8616). Bellingham. https://doi.org/10.1117/12.2004911
Brown, G. ; Bauer, R. ; Lubeigt, W. ; Uttamchandani, D. / SOI based electromagnetic MEMS scanners and their applications in laser systems. Moems and Miniaturized Systems XII. editor / W. Piyawattanametha ; Y.H Park. Bellingham, 2013. (Proceedings of SPIE).
@inproceedings{c5814ea8d9c644db9669c8ed8cf91fc2,
title = "SOI based electromagnetic MEMS scanners and their applications in laser systems",
abstract = "MEMS scanners are of interest for their potential as low-cost, low operating power devices for use in various photonic systems. The devices reported here are actuated by the electromagnetic force between a static external magnetic field and a current flowing through an SOI MEMS scanner. These scanners have several modes of operation: their mirrors may be rotated and maintained at a static angle (up to ± 1.4 degrees), scanned rapidly (up to 500 Hz); or may be operated in a resonance mode, at the device's mechanical resonance frequency (∼1.2 kHz) for higher rate scanning. The use of these scanners as a Q-switching element within a Nd:YAG laser cavity has been demonstrated. Pulse durations of 400 ns were obtained with a pulse energy of 58 μJ and a pulse peak power of 145 W. The use of an external magnetic field, generated by compact rare-earth magnets, allows a simple and cost-effective commercial fabrication process to be employed (the multi-user SOI process provided by MEMSCAP Inc) and avoids the requirement to deposit magnetic materials on the MEMS structure.",
keywords = "electromagnetic, intra-cavity, laser, MEMS, multi-user, Q-switch, scanner, SOI",
author = "G. Brown and R. Bauer and W. Lubeigt and D. Uttamchandani",
year = "2013",
month = "6",
day = "12",
doi = "10.1117/12.2004911",
language = "English",
isbn = "9780819493859",
series = "Proceedings of SPIE",
publisher = "SPIE",
editor = "W. Piyawattanametha and Y.H Park",
booktitle = "Moems and Miniaturized Systems XII",

}

Brown, G, Bauer, R, Lubeigt, W & Uttamchandani, D 2013, SOI based electromagnetic MEMS scanners and their applications in laser systems. in W Piyawattanametha & YH Park (eds), Moems and Miniaturized Systems XII., 86160G, Proceedings of SPIE, vol. 8616, Bellingham, Conference on MOEMS and Miniaturized Systems XII, San Francisco, United States, 4/02/13. https://doi.org/10.1117/12.2004911

SOI based electromagnetic MEMS scanners and their applications in laser systems. / Brown, G.; Bauer, R.; Lubeigt, W.; Uttamchandani, D.

Moems and Miniaturized Systems XII. ed. / W. Piyawattanametha; Y.H Park. Bellingham, 2013. 86160G (Proceedings of SPIE; Vol. 8616).

Research output: Chapter in Book/Report/Conference proceedingConference contribution book

TY - GEN

T1 - SOI based electromagnetic MEMS scanners and their applications in laser systems

AU - Brown, G.

AU - Bauer, R.

AU - Lubeigt, W.

AU - Uttamchandani, D.

PY - 2013/6/12

Y1 - 2013/6/12

N2 - MEMS scanners are of interest for their potential as low-cost, low operating power devices for use in various photonic systems. The devices reported here are actuated by the electromagnetic force between a static external magnetic field and a current flowing through an SOI MEMS scanner. These scanners have several modes of operation: their mirrors may be rotated and maintained at a static angle (up to ± 1.4 degrees), scanned rapidly (up to 500 Hz); or may be operated in a resonance mode, at the device's mechanical resonance frequency (∼1.2 kHz) for higher rate scanning. The use of these scanners as a Q-switching element within a Nd:YAG laser cavity has been demonstrated. Pulse durations of 400 ns were obtained with a pulse energy of 58 μJ and a pulse peak power of 145 W. The use of an external magnetic field, generated by compact rare-earth magnets, allows a simple and cost-effective commercial fabrication process to be employed (the multi-user SOI process provided by MEMSCAP Inc) and avoids the requirement to deposit magnetic materials on the MEMS structure.

AB - MEMS scanners are of interest for their potential as low-cost, low operating power devices for use in various photonic systems. The devices reported here are actuated by the electromagnetic force between a static external magnetic field and a current flowing through an SOI MEMS scanner. These scanners have several modes of operation: their mirrors may be rotated and maintained at a static angle (up to ± 1.4 degrees), scanned rapidly (up to 500 Hz); or may be operated in a resonance mode, at the device's mechanical resonance frequency (∼1.2 kHz) for higher rate scanning. The use of these scanners as a Q-switching element within a Nd:YAG laser cavity has been demonstrated. Pulse durations of 400 ns were obtained with a pulse energy of 58 μJ and a pulse peak power of 145 W. The use of an external magnetic field, generated by compact rare-earth magnets, allows a simple and cost-effective commercial fabrication process to be employed (the multi-user SOI process provided by MEMSCAP Inc) and avoids the requirement to deposit magnetic materials on the MEMS structure.

KW - electromagnetic

KW - intra-cavity

KW - laser

KW - MEMS

KW - multi-user

KW - Q-switch

KW - scanner

KW - SOI

UR - http://www.scopus.com/inward/record.url?scp=84878729316&partnerID=8YFLogxK

U2 - 10.1117/12.2004911

DO - 10.1117/12.2004911

M3 - Conference contribution book

SN - 9780819493859

T3 - Proceedings of SPIE

BT - Moems and Miniaturized Systems XII

A2 - Piyawattanametha, W.

A2 - Park, Y.H

CY - Bellingham

ER -

Brown G, Bauer R, Lubeigt W, Uttamchandani D. SOI based electromagnetic MEMS scanners and their applications in laser systems. In Piyawattanametha W, Park YH, editors, Moems and Miniaturized Systems XII. Bellingham. 2013. 86160G. (Proceedings of SPIE). https://doi.org/10.1117/12.2004911