A novel design of a MEMS DC/DC converter that has single input and two outputs based on the tunable capacitor principle is reported. The multiple-output has been achieved by designing comb finger pairs with different gaps located in the same structure. The device prototype has been designed and fabricated by SOIMUMPs, which is 1 times 1 mm in size. Measurement results show that it takes around 50 ms for the converter to convert a 5 V signal to two different voltages simultaneously, which are 9 and 6.8 V, respectively.
- DC-DC power convertors
- micromechanical devices