Simulation of monolithic active pixels in deep sub-micron technologies

S Manolopoulos, K Mathieson, R Turchetta

Research output: Contribution to journalArticlepeer-review


The use of monolithic active pixels (MAPS) has quickly spread in a number of scientific fields ranging from imaging to high-energy particle physics applications. The success of MAPS is due to a number of reasons, for example their low
power consumption, fast readout, high spatial resolution and low cost. The latter reflects the use of standard CMOS processes for fabrication. In this paper, the performance of MAPS designed in 0.25 mm technology will be modelled by
means of TCAD device simulation software. The dependence of the device performance on parameters that affect the detection of minimum ionising particles (MIP) will be studied aiming at the optimisation ofthe detector performance.
More specifically, the simulations will focus on the influence of the epitaxial layer thickness on the amount of collected charge, that defines the signal and the cluster size, that affects the spatial resolution.
Original languageEnglish
Pages (from-to)181-187
Number of pages7
JournalNuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment
Issue number1-2
Publication statusPublished - 11 Jul 2002


  • photonics
  • MAPS
  • device simulation
  • monolithic active pixels
  • sub-micron particles


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