Abstract
The growth of microfabrication technologies for biomedical, chemical and lab-on-a-chip applications is leading chemical engineers into the field of microtechnology. One of the important processes in microfabrication is electrochemical deposition. Usually, the most important criterion for an electrodeposition reactor performance is the uniformity of metal plated on different parts of the substrate. This paper discusses the use of computerised modelling in the form of specialised software, ElSy, which can be used to improve the uniformity of deposited metal. ElSy, a commercially available software, can been used to simulate the current lines within the reactor and visualise the effect of reactor geometry and mass transfer, which controls the uniformity of electrochemical reactions.
| Original language | English |
|---|---|
| Pages (from-to) | 118-121 |
| Number of pages | 4 |
| Journal | Transactions of the Institute of Metal Finishing |
| Volume | 87 |
| Issue number | 3 |
| DOIs | |
| Publication status | Published - 1 May 2009 |
Keywords
- computer software
- electric reactors
- electrochemistry