Silicon metal-oxide-semiconductor quantum dots for single-electron pumping

Alessandro Rossi, Tuomo Tanttu, Fay E. Hudson, Yuxin Sun, Mikko Möttönen, Andrew S. Dzurak

Research output: Contribution to journalArticlepeer-review

11 Citations (Scopus)


As mass-produced silicon transistors have reached the nano-scale, their behavior and performances are increasingly affected, and often deteriorated, by quantum mechanical effects such as tunneling through single dopants, scattering via interface defects, and discrete trap charge states. However, progress in silicon technology has shown that these phenomena can be harnessed and exploited for a new class of quantumbased electronics. Among others, multi-layer-gated silicon metal-oxide-semiconductor (MOS) technology can be used to control single charge or spin confined in electrostatically-defined quantum dots (QD). These QD-based devices are an excellent platform for quantum computing applications and, recently, it has been demonstrated that they can also be used as single-electron pumps, which are accurate sources of quantized current for metrological purposes. Here, we discuss in detail the fabrication protocol for silicon MOS QDs which is relevant to both quantum computing and quantum metrology applications. Moreover, we describe characterization methods to test the integrity of the devices after fabrication. Finally, we give a brief description of the measurement set-up used for charge pumping experiments and show representative results of electric current quantization.

Original languageEnglish
Article numbere52852
JournalJournal of Visualized Experiments
Issue number100
Publication statusPublished - 3 Jun 2015


  • charge pumping
  • engineering
  • siliconIssue 100
  • nanoelectronics
  • quantum metrology
  • quantum dots


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