Silicon for thin-film transistors

S. Wagner; Helena Gleskova; I. C. Cheng; M. Wu

Silicon for thin-film transistors

S. Wagner
, Helena Gleskova
, I. C. Cheng
, M. Wu

Electronic And Electrical Engineering

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution book

101 Citations (Scopus)

Abstract

This chapter looks at silicon for thin-film transistors.

Original language	English
Title of host publication	Proceedings of the Second International Conference on Cat-CVD (Hot-Wire CVD) Process
Editors	Ruud E. I. Schropp, Markus B. Schubert
Place of Publication	Amsterdam
Pages	1-6
Number of pages	6
Volume	430
Publication status	Published - 2003
Event	2nd International Conference on Hot-Wire CVD Process - Denver, United States Duration: 10 Sept 2002 → 13 Sept 2002

Conference

Conference	2nd International Conference on Hot-Wire CVD Process
Country/Territory	United States
City	Denver
Period	10/09/02 → 13/09/02

Keywords

silicon
thin-film transistors

Cite this

@inproceedings{0ad71ab1cb6746b79d18fc7b2ad67bd8,

title = "Silicon for thin-film transistors",

abstract = "This chapter looks at silicon for thin-film transistors.",

keywords = "silicon, thin-film transistors",

author = "S. Wagner and Helena Gleskova and Cheng, \{I. C.\} and M. Wu",

year = "2003",

language = "English",

volume = "430",

pages = "1--6",

editor = "Schropp, \{Ruud E. I.\} and Schubert, \{Markus B.\}",

booktitle = "Proceedings of the Second International Conference on Cat-CVD (Hot-Wire CVD) Process",

note = "2nd International Conference on Hot-Wire CVD Process ; Conference date: 10-09-2002 Through 13-09-2002",

}

TY - GEN

T1 - Silicon for thin-film transistors

AU - Wagner, S.

AU - Gleskova, Helena

AU - Cheng, I. C.

AU - Wu, M.

PY - 2003

Y1 - 2003

N2 - This chapter looks at silicon for thin-film transistors.

AB - This chapter looks at silicon for thin-film transistors.

KW - silicon

KW - thin-film transistors

UR - http://www.worldcat.org/oclc/52388606

M3 - Conference contribution book

VL - 430

SP - 1

EP - 6

BT - Proceedings of the Second International Conference on Cat-CVD (Hot-Wire CVD) Process

A2 - Schropp, Ruud E. I.

A2 - Schubert, Markus B.

CY - Amsterdam

T2 - 2nd International Conference on Hot-Wire CVD Process

Y2 - 10 September 2002 through 13 September 2002

ER -

Silicon for thin-film transistors

Abstract

Conference

Keywords

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