Silicon for thin-film transistors

S. Wagner, Helena Gleskova, I. C. Cheng, M. Wu

Research output: Chapter in Book/Report/Conference proceedingConference contribution book

92 Citations (Scopus)

Abstract

This chapter looks at silicon for thin-film transistors.
LanguageEnglish
Title of host publicationProceedings of the Second International Conference on Cat-CVD (Hot-Wire CVD) Process
EditorsRuud E. I. Schropp, Markus B. Schubert
Place of PublicationAmsterdam
Pages1-6
Number of pages6
Volume430
Publication statusPublished - 2003
Event2nd International Conference on Hot-Wire CVD Process - Denver, United States
Duration: 10 Sep 200213 Sep 2002

Conference

Conference2nd International Conference on Hot-Wire CVD Process
CountryUnited States
CityDenver
Period10/09/0213/09/02

Fingerprint

Thin film transistors
Silicon

Keywords

  • silicon
  • thin-film transistors

Cite this

Wagner, S., Gleskova, H., Cheng, I. C., & Wu, M. (2003). Silicon for thin-film transistors. In R. E. I. Schropp, & M. B. Schubert (Eds.), Proceedings of the Second International Conference on Cat-CVD (Hot-Wire CVD) Process (Vol. 430, pp. 1-6). Amsterdam.
Wagner, S. ; Gleskova, Helena ; Cheng, I. C. ; Wu, M. / Silicon for thin-film transistors. Proceedings of the Second International Conference on Cat-CVD (Hot-Wire CVD) Process. editor / Ruud E. I. Schropp ; Markus B. Schubert. Vol. 430 Amsterdam, 2003. pp. 1-6
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Wagner, S, Gleskova, H, Cheng, IC & Wu, M 2003, Silicon for thin-film transistors. in REI Schropp & MB Schubert (eds), Proceedings of the Second International Conference on Cat-CVD (Hot-Wire CVD) Process. vol. 430, Amsterdam, pp. 1-6, 2nd International Conference on Hot-Wire CVD Process, Denver, United States, 10/09/02.

Silicon for thin-film transistors. / Wagner, S.; Gleskova, Helena; Cheng, I. C.; Wu, M.

Proceedings of the Second International Conference on Cat-CVD (Hot-Wire CVD) Process. ed. / Ruud E. I. Schropp; Markus B. Schubert. Vol. 430 Amsterdam, 2003. p. 1-6.

Research output: Chapter in Book/Report/Conference proceedingConference contribution book

TY - GEN

T1 - Silicon for thin-film transistors

AU - Wagner, S.

AU - Gleskova, Helena

AU - Cheng, I. C.

AU - Wu, M.

PY - 2003

Y1 - 2003

N2 - This chapter looks at silicon for thin-film transistors.

AB - This chapter looks at silicon for thin-film transistors.

KW - silicon

KW - thin-film transistors

UR - http://www.worldcat.org/oclc/52388606

M3 - Conference contribution book

VL - 430

SP - 1

EP - 6

BT - Proceedings of the Second International Conference on Cat-CVD (Hot-Wire CVD) Process

A2 - Schropp, Ruud E. I.

A2 - Schubert, Markus B.

CY - Amsterdam

ER -

Wagner S, Gleskova H, Cheng IC, Wu M. Silicon for thin-film transistors. In Schropp REI, Schubert MB, editors, Proceedings of the Second International Conference on Cat-CVD (Hot-Wire CVD) Process. Vol. 430. Amsterdam. 2003. p. 1-6