Silicon for thin-film transistors

S. Wagner, Helena Gleskova, I. C. Cheng, M. Wu

Research output: Chapter in Book/Report/Conference proceedingConference contribution book

94 Citations (Scopus)

Abstract

This chapter looks at silicon for thin-film transistors.
Original languageEnglish
Title of host publicationProceedings of the Second International Conference on Cat-CVD (Hot-Wire CVD) Process
EditorsRuud E. I. Schropp, Markus B. Schubert
Place of PublicationAmsterdam
Pages1-6
Number of pages6
Volume430
Publication statusPublished - 2003
Event2nd International Conference on Hot-Wire CVD Process - Denver, United States
Duration: 10 Sep 200213 Sep 2002

Conference

Conference2nd International Conference on Hot-Wire CVD Process
CountryUnited States
CityDenver
Period10/09/0213/09/02

Keywords

  • silicon
  • thin-film transistors

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