Silicon doping of gallium nitride using ditertiarybutylsilane

C.J. Deatcher; C. Liu; M.G. Cheong; L.M. Smith; S. Rushworth; A. Widdowson; I.M. Watson

doi:10.1002/cvde.200304171

Silicon doping of gallium nitride using ditertiarybutylsilane

C.J. Deatcher, C. Liu, M.G. Cheong, L.M. Smith, S. Rushworth, A. Widdowson, I.M. Watson

Research output: Contribution to journal › Article › peer-review

14 Citations (Scopus)

Abstract

No abstract

Original language	English
Pages (from-to)	187-190
Number of pages	3
Journal	Chemical Vapor Deposition
Volume	10
Issue number	4
DOIs	https://doi.org/10.1002/cvde.200304171
Publication status	Published - 8 Sept 2004

Keywords

gallium nitride
metal-organic vapor phase epitaxy
silanes
silicon doping

Access to Document

10.1002/cvde.200304171

Cite this

@article{40ecf86d05c741b98f2ed98bc29f4ef8,

title = "Silicon doping of gallium nitride using ditertiarybutylsilane",

abstract = "No abstract",

keywords = "gallium nitride, metal-organic vapor phase epitaxy, silanes, silicon doping",

author = "C.J. Deatcher and C. Liu and M.G. Cheong and L.M. Smith and S. Rushworth and A. Widdowson and I.M. Watson",

year = "2004",

month = sep,

day = "8",

doi = "10.1002/cvde.200304171",

language = "English",

volume = "10",

pages = "187--190",

journal = "Chemical Vapor Deposition",

issn = "0948-1907",

publisher = "Wiley-VCH Verlag",

number = "4",

}

TY - JOUR

T1 - Silicon doping of gallium nitride using ditertiarybutylsilane

AU - Deatcher, C.J.

AU - Liu, C.

AU - Cheong, M.G.

AU - Smith, L.M.

AU - Rushworth, S.

AU - Widdowson, A.

AU - Watson, I.M.

PY - 2004/9/8

Y1 - 2004/9/8

N2 - No abstract

AB - No abstract

KW - gallium nitride

KW - metal-organic vapor phase epitaxy

KW - silanes

KW - silicon doping

UR - http://dx.doi.org/10.1002/cvde.200304171

U2 - 10.1002/cvde.200304171

DO - 10.1002/cvde.200304171

M3 - Article

SN - 0948-1907

VL - 10

SP - 187

EP - 190

JO - Chemical Vapor Deposition

JF - Chemical Vapor Deposition

IS - 4

ER -

Silicon doping of gallium nitride using ditertiarybutylsilane

Abstract

Keywords

Access to Document

Other files and links

Fingerprint

Cite this