Silane nanopatterns via gas-phase soft lithography

Roberto De La Rica; Antonio Baldi; Ernest Mendoza; Alvaro San Paulo; Andreu Llobera; Cesar Fernandez-Sanchez

doi:10.1002/smll.200701038

Silane nanopatterns via gas-phase soft lithography

Roberto De La Rica, Antonio Baldi, Ernest Mendoza, Alvaro San Paulo, Andreu Llobera, Cesar Fernandez-Sanchez

Physics

Research output: Contribution to journal › Article › peer-review

10 Citations (Scopus)

Abstract

A new soft-lithography approach for direct silane nanopatterning, known as gas-transfer lithography, is presented and tested. Chemically active two-dimensional replicas of carbon nanotubes are attained (see image). Amplitude modulation atomic force microscopy reveals silane patterns with distinctive dimensions and chemical composition.

Original language	English
Pages (from-to)	1076-1079
Number of pages	4
Journal	Small
Volume	4
Issue number	8
DOIs	https://doi.org/10.1002/smll.200701038
Publication status	Published - Aug 2008

Keywords

soft lithography
silane nanopatterns
gas-phase
nanopatterning
organoalkoxysilanes
reactions
nanolithography

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10.1002/smll.200701038

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title = "Silane nanopatterns via gas-phase soft lithography",

abstract = "A new soft-lithography approach for direct silane nanopatterning, known as gas-transfer lithography, is presented and tested. Chemically active two-dimensional replicas of carbon nanotubes are attained (see image). Amplitude modulation atomic force microscopy reveals silane patterns with distinctive dimensions and chemical composition.",

keywords = "soft lithography, silane nanopatterns, gas-phase, nanopatterning, organoalkoxysilanes, reactions, nanolithography",

author = "{De La Rica}, Roberto and Antonio Baldi and Ernest Mendoza and {San Paulo}, Alvaro and Andreu Llobera and Cesar Fernandez-Sanchez",

year = "2008",

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T1 - Silane nanopatterns via gas-phase soft lithography

AU - De La Rica, Roberto

AU - Baldi, Antonio

AU - Mendoza, Ernest

AU - San Paulo, Alvaro

AU - Llobera, Andreu

AU - Fernandez-Sanchez, Cesar

PY - 2008/8

Y1 - 2008/8

N2 - A new soft-lithography approach for direct silane nanopatterning, known as gas-transfer lithography, is presented and tested. Chemically active two-dimensional replicas of carbon nanotubes are attained (see image). Amplitude modulation atomic force microscopy reveals silane patterns with distinctive dimensions and chemical composition.

AB - A new soft-lithography approach for direct silane nanopatterning, known as gas-transfer lithography, is presented and tested. Chemically active two-dimensional replicas of carbon nanotubes are attained (see image). Amplitude modulation atomic force microscopy reveals silane patterns with distinctive dimensions and chemical composition.

KW - soft lithography

KW - silane nanopatterns

KW - gas-phase

KW - nanopatterning

KW - organoalkoxysilanes

KW - reactions

KW - nanolithography

U2 - 10.1002/smll.200701038

DO - 10.1002/smll.200701038

M3 - Article

SN - 1613-6810

VL - 4

SP - 1076

EP - 1079

JO - Small

JF - Small

IS - 8

ER -

Silane nanopatterns via gas-phase soft lithography

Abstract

Keywords

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