Short channel amorphous-silicon TFTs on high-temperature clear plastic substrates: [LED display applications]

K. Long, H. Gleskova, Sigurd Wagner, J. C. Sturm

Research output: Chapter in Book/Report/Conference proceedingConference contribution book

12 Citations (Scopus)


The short-channel performance of amorphous silicon-based thin film transistors (TFT) on high-temperature plastic substrate, was investigated. The TFT device structure was modified and plasma enhanced chemical vapor deposition (PECVD) was used to enhance the adhesion between the SiN x buffer and the substrate. The source-gate leakage current was smaller than 0.01 nA and it was limited by the measurement apparatus. The results show that the plastic substrates were freestanding and not mounted to rigid susbtrates for fabrication, which is critical for maintaining a clean and clear back surface for the optical devices.

Original languageEnglish
Title of host publicationDevice Research Conference - Conference Digest, DRC
Number of pages2
ISBN (Print)0780382846
Publication statusPublished - 1 Dec 2004
Event62nd DRC Device Research Conference, 2004 - Indiana, United States
Duration: 21 Jun 200423 Jun 2004


Conference62nd DRC Device Research Conference, 2004
Country/TerritoryUnited States


  • temperature
  • active matrix organic light emitting diodes
  • displays
  • glass
  • light emitting diodes
  • optical device fabrication
  • optical devices
  • organic light emitting diodes
  • plastics
  • surface cleaning


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