Sensor Fluid Reservoirs for Microfabricated Sensor Cells

Roozbeh Parsa (Inventor), Nathan Brockie (Inventor), Terry Dyer (Inventor), William French (Inventor), Iouri N. Mirgorodski (Inventor)

Research output: Patent

Abstract

A sensor cell has a chamber that defines an internal sensor volume for a sensor fluid in a vapor phase. A signal path extends into the internal sensor volume. The sensor cell includes a condensation reservoir for a condensed phase of the sensor fluid, in fluid communication with the internal sensor volume. The signal path is spatially separate from the condensation reservoir. During operation of the sensor cell, some of the sensor fluid may be converted to a vapor phase in the internal sensor volume. During such operation, sensor fluid in the condensed phase is disposed in the condensation reservoir, advantageously out of the signal path, leaving the signal path desirably free of the condensed phase sensor fluid. During periods of non-operation, a significant portion of the sensor fluid may condense from the vapor phase to the condensed phase in the condensation reservoir, advantageously out of the signal path.
Original languageEnglish
Patent numberUS 2017/0199138 A1
IPCG01N25/02
Priority date11/01/16
Publication statusPublished - 13 Jul 2017

Keywords

  • sensor cells
  • signal path
  • condensation reservoir

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