Abstract
A giant magneto-impedance (GMI) magnetometer is formed in a semiconductor wafer fabrication sequence, which significantly reduces the size and cost of the GMI magnetometer. The semiconductor wafer fabrication sequence forms a magnetic conductor, a non-magnetic conductor that is wrapped around the magnetic conductor as a coil, and non-magnetic conductors that touch the opposite ends of the magnetic conductor.
| Original language | English |
|---|---|
| Patent number | US 8680854 B2 |
| IPC | G01R33/00 |
| Priority date | 1/12/11 |
| Publication status | Published - 25 Mar 2014 |
Keywords
- giant magneto impedance
- magnetometer
- semiconductor magnetometer