A giant magneto-impedance (GMI) magnetometer is formed in a semiconductor wafer fabrication sequence, which significantly reduces the size and cost of the GMI magnetometer. The semiconductor wafer fabrication sequence forms a magnetic conductor, a non-magnetic conductor that is wrapped around the magnetic conductor as a coil, and non-magnetic conductors that touch the opposite ends of the magnetic conductor.
|Patent number||US 8680854 B2|
|Publication status||Published - 25 Mar 2014|
- giant magneto impedance
- semiconductor magnetometer