Scanning probe lithography: state-of-the-art and future perspectives

Pengfei Fan, Jian Gao, Hui Mao, Yanquan Geng, Yongda Yan, Yuzhang Wang, Saurav Goel, Xichun Luo

Research output: Contribution to journalReview articlepeer-review

41 Citations (Scopus)
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