Scanning electron microscopy as a flexible tool for investigating the properties of UV-emitting nitride semiconductor thin films

C. Trager-Cowan, A. Alasmari, W. Avis, J. Bruckbauer, P. R. Edwards, B. Hourahine, S. Kraeusel, G. Kusch, R. Johnston, G. Naresh-Kumar, R. W. Martin, M. Nouf-Allehiani, E. Pascal, L. Spasevski, D. Thomson, S. Vespucci, P. J. Parbrook, M. D. Smith, J. Enslin, F. MehnkeM. Kneissl, C. Kuhn, T. Wernicke, S. Hagedorn, A. Knauer, V. Kueller, S. Walde, M. Weyers, P.-M. Coulon, P. A. Shields, Y. Zhang, L. Jiu, Yipin Gong, R. M. Smith, T. Wang, A. Winkelmann

Research output: Contribution to journalArticle

2 Citations (Scopus)

Abstract

In this paper we describe the scanning electron microscopy techniques of electron backscatter diffraction, electron channeling contrast imaging, wavelength dispersive X-ray spectroscopy, and cathodoluminescence hyperspectral imaging. We present our recent results on the use of these non-destructive techniques to obtain information on the topography, crystal misorientation, defect distributions, composition, doping, and light emission from a range of UV-emitting nitride semiconductor structures. We aim to illustrate the developing capability of each of these techniques for understanding the properties of UV-emitting nitride semiconductors, and the benefits were appropriate, in combining the techniques.
Original languageEnglish
Pages (from-to)B73-B82
Number of pages10
JournalPhotonics Research
Volume7
Issue number11
DOIs
Publication statusPublished - 30 Oct 2019

Keywords

  • scanning electron microscopy
  • electron backscatter diffraction
  • non-destructive techniques
  • UV emitting nitride semiconductors

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    Data for: "Determining GaN nanowire polarity and its influence on light emission in the scanning electron microscope"

    Gunasekar, N. (Creator), Bruckbauer, J. (Creator), Winkelmann, A. (Contributor), Edwards, P. (Contributor), Hourahine, B. (Contributor), Trager-Cowan, C. (Contributor), Martin, R. (Supervisor) & Wang, T. (Creator), University of Strathclyde, 29 Apr 2019

    Dataset

    Data for: “Scanning electron microscopy as a flexible technique for investigating the properties of UV-emitting nitride semiconductor thin films”

    Trager-Cowan, C. (Creator), Alasmari, A. M. A. (Creator), Avis, W. (Contributor), Bruckbauer, J. (Creator), Edwards, P. (Contributor), Hourahine, B. (Contributor), Kraeusel, S. (Contributor), Kusch, G. (Creator), Johnston, R. (Contributor), Gunasekar, N. (Creator), Martin, R. (Contributor), Mohammad S, A. (Creator), Pascal, E. (Contributor), Spasevski, L. (Creator), Thomson, D. (Contributor), Vespucci, S. (Contributor), Parbrook, P. (Contributor), Smith, M. (Contributor), Enslin, J. (Contributor), Mehnke, F. (Contributor), Kneissl, M. (Contributor), Kuhn, C. (Contributor), Wernicke, T. (Contributor), Hagedorn, S. (Contributor), Knauer, A. (Contributor), Kueller, V. (Contributor), Walde, S. (Contributor), Weyers, M. (Contributor), Coulon, P. (Creator), Shields, P. (Contributor), Zhang, Y. (Contributor), Jiu, L. (Contributor), Gong, Y. (Contributor), Smith, R. M. (Contributor), Wang, T. (Contributor) & Winkelmann, A. (Creator), University of Strathclyde, 28 Oct 2019

    Dataset

    Equipment

    ESEM Quanta 250

    Robert Martin (Manager)

    Physics

    Facility/equipment: Equipment

  • SEM SIRION 200

    Robert Martin (Manager)

    Physics

    Facility/equipment: Equipment

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