Abstract
Results on the reversibility of the light-induced saturation and dark- and light-annealing of the deep-level defects in a-S:H films are presented. The value of the saturated defect density (Nsat) in three samples obtained after initial light-soaking was observed to decrease upon cyclic light-annealing and saturation. This drop in Nsat was observed in two samples after the second illumination while in another sample the drop was observed only after a series of experiments carried out to determine the temperature dependence of Nsat
Original language | English |
---|---|
Pages (from-to) | 279-283 |
Number of pages | 5 |
Journal | Materials Letters |
Volume | 13 |
Issue number | 4-5 |
Publication status | Published - 1992 |
Keywords
- light-induced saturation
- annealing
- saturated defect density