Remote-refocus microscopy using a MEMS piston micromirror

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We demonstrate a remote-refocus microscopy system with volume acquisition rates of up to 150 Hz using a microelectromechanical systems (MEMS) mirror with controllable piston movement. The small footprint, affordable and easily controllable 2 mm mirror allows nm scale alignment precision of the focal plane, with an overall axial focus shift of up to 100µm with a 100x 1.25 NA imaging objective.
Original languageEnglish
Publication statusPublished - 3 Jul 2023
EventMicroscience Microscopy Congress 2023 - Manchester Central, Manchester, United Kingdom
Duration: 3 Jul 20236 Jul 2023


ConferenceMicroscience Microscopy Congress 2023
Abbreviated titlemmc2023
Country/TerritoryUnited Kingdom
Internet address


  • remote-refocus microscopy system
  • volumetric imaging
  • focal adjustment
  • microscope systems


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