Reflection/transmission confocal microscopy characterization of single-crystal diamond microlens arrays

E. Gu, H.W. Choi, C. Liu, C. Griffin, J.M. Girkin, I.M. Watson, M.D. Dawson, G. McConnell, A.M. Gurney

Research output: Contribution to journalArticle

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Abstract

Using the method of photoresist reflow and inductively coupled plasma dry etching, we have fabricated microlens arrays in type-IIa natural single-crystal diamond, with diameters down to 10 µm. The surface profile of the microlenses was characterized by atomic force microscopy and was found to match well with a spherical shape, with a surface roughness of better than 1.2 nm. To characterize the optical properties of these diamond microlens arrays, a laser scanning reflection/transmission confocal microscopy technique has been developed. This technique enabled the surface profile of the microlenses to be measured simultaneously with optical parameters including focal length and spot size, opening up an application area for confocal microscopy.
LanguageEnglish
Pages2754-2756
Number of pages2
JournalApplied Physics Letters
Volume84
Issue number15
DOIs
Publication statusPublished - 2004

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diamonds
microscopy
single crystals
profiles
photoresists
surface roughness
etching
atomic force microscopy
optical properties
scanning
lasers

Keywords

  • confocal microscopy
  • microlens array
  • lasers
  • optics
  • photonics

Cite this

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title = "Reflection/transmission confocal microscopy characterization of single-crystal diamond microlens arrays",
abstract = "Using the method of photoresist reflow and inductively coupled plasma dry etching, we have fabricated microlens arrays in type-IIa natural single-crystal diamond, with diameters down to 10 µm. The surface profile of the microlenses was characterized by atomic force microscopy and was found to match well with a spherical shape, with a surface roughness of better than 1.2 nm. To characterize the optical properties of these diamond microlens arrays, a laser scanning reflection/transmission confocal microscopy technique has been developed. This technique enabled the surface profile of the microlenses to be measured simultaneously with optical parameters including focal length and spot size, opening up an application area for confocal microscopy.",
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Reflection/transmission confocal microscopy characterization of single-crystal diamond microlens arrays. / Gu, E.; Choi, H.W.; Liu, C.; Griffin, C.; Girkin, J.M.; Watson, I.M.; Dawson, M.D.; McConnell, G.; Gurney, A.M.

In: Applied Physics Letters, Vol. 84, No. 15, 2004, p. 2754-2756.

Research output: Contribution to journalArticle

TY - JOUR

T1 - Reflection/transmission confocal microscopy characterization of single-crystal diamond microlens arrays

AU - Gu, E.

AU - Choi, H.W.

AU - Liu, C.

AU - Griffin, C.

AU - Girkin, J.M.

AU - Watson, I.M.

AU - Dawson, M.D.

AU - McConnell, G.

AU - Gurney, A.M.

PY - 2004

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AB - Using the method of photoresist reflow and inductively coupled plasma dry etching, we have fabricated microlens arrays in type-IIa natural single-crystal diamond, with diameters down to 10 µm. The surface profile of the microlenses was characterized by atomic force microscopy and was found to match well with a spherical shape, with a surface roughness of better than 1.2 nm. To characterize the optical properties of these diamond microlens arrays, a laser scanning reflection/transmission confocal microscopy technique has been developed. This technique enabled the surface profile of the microlenses to be measured simultaneously with optical parameters including focal length and spot size, opening up an application area for confocal microscopy.

KW - confocal microscopy

KW - microlens array

KW - lasers

KW - optics

KW - photonics

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DO - 10.1063/1.1695101

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EP - 2756

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T2 - Applied Physics Letters

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