RBS-channeling study of radiation damage in Ar+ implanted CuInSe2 crystals

Michael V. Yakushev, Vladimir A. Volkov, Niyazi N. Mursakulov, Chimnaz E. Sabzaliyeva, Robert W. Martin

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Chalcopyrite solar cells are reported to have a high tolerance to irradiation by high energy electrons or ions, but the origin of this is not well understood. This work studies the evolution of damage in Ar + -bombarded CuInSe 2 single crystal using Rutherford backscattering/channeling analysis. Ar + ions of 30 keV were implanted with doses in the range from 10 12 to 3 × 10 16 cm -2 at room temperature. Implantation was found to create two layers of damage: (1) on the surface, caused by preferential sputtering of Se and Cu atoms; (2) at the layer of implanted Ar, possibly consisting of stacking faults and dislocation loops. The damage in the second layer was estimated to be less than 2% of the theoretical prediction suggesting efficient healing of primary implantation defects.
Original languageEnglish
Article number051203
Number of pages6
JournalJournal of Vacuum Science and Technology A
Issue number5
Publication statusPublished - 1 Sep 2016


  • radiation damage
  • CuInSe2
  • solar cells
  • Rutherford backscattering
  • RBS
  • Chalcopyrite


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