Range extension of a bimorph varifocal micromirror through actuation by a Peltier element

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Abstract

A bimorph varifocal micromirror actuated thermoelectrically by a Peltier element is reported. The single crystal silicon micromirror is 1.2 mm in diameter with a centered 1 mm diameter gold coating for broadband reflection. The actuation principle is capable of varying the micromirror temperature above and below the ambient temperature, which contributed to a 57% improvement in the addressable curvature range in comparison to previously reported electrothermal and optothermal actuation techniques for the device. Altering the device temperature from 10 C to 100 C provided a mirror surface radius of curvature variation from 19.2 mm to 30.9 mm respectively. The experimental characterization of the micromirror was used as a basis for accurate finite element modeling of the device and its actuation. Negligible optical aberrations are observed over the operating range, enabling effectively aberration-free imaging. Demonstration in an optical imaging system illustrated sharp imaging of objects over a focal plane variation of 212 mm.
Original languageEnglish
Article number2701007
Number of pages7
JournalIEEE Journal of Selected Topics in Quantum Electronics
Volume21
Issue number4
Early online date18 Dec 2014
DOIs
Publication statusPublished - 31 Aug 2015

Keywords

  • optical MEMS
  • temperature measurement
  • varifocal micromirror
  • micromirrors
  • silicon-on-insulator multi-user MEMS processes (SOIMUMPs)
  • thermal actuation

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