Quantification of trace-level silicon doping in AlxGa1–xN films using wavelength-dispersive X-ray microanalysis

Lucia Spasevski, Ben Buse, Paul R. Edwards, Daniel A. Hunter, Johannes Enslin, Humberto M. Foronda, Tim Wernicke, Frank Mehnke, Peter J. Parbrook, Michael Kneissl, Robert W. Martin

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