Abstract
A comb-drive actuated MEMS scanning mirror is used to actively Q-switch a side-pumped Nd:YAG laser. Minimum pulse durations of 38 ns are observed and maximum average output powers of 55 mW at 17.625 kHz pulse repetition frequency.
| Original language | English |
|---|---|
| Title of host publication | International Conference on Optical MEMS and Nanophotonics (OMN), 2012 |
| Place of Publication | Piscataway, NJ, United States |
| Publisher | IEEE |
| Pages | 81-82 |
| Number of pages | 2 |
| ISBN (Print) | 9781457715112 |
| DOIs | |
| Publication status | Published - 22 Nov 2012 |
Keywords
- active Q-switching
- electrostatic MEMS scanning mirror
- inta-cavity MEMS mirror
- solid-state laser
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