Promising lithography techniques for next generation logic devices: a review

Rashed Md. Murad Hasan
, Xichun Luo

Design, Manufacturing And Engineering Management

Research output: Contribution to journal › Review article › peer-review

161 Citations (Scopus)

306 Downloads (Pure)

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Micro-3D: Miniature Flexible & Reconfigurable Manufacturing System for 3D Micro-products
Luo, X. (Principal Investigator), Ion, W. (Co-investigator), Qin, Y. (Co-investigator), Jagadeesan, A. P. (Researcher) & Zeng, Q. (Researcher)
EPSRC (Engineering and Physical Sciences Research Council)
1/07/13 → 31/12/17
Project: Research