Abstract
This paper will examine the principles and prospects for optically generated and detected ultrasound
in the context of the characterisation of microscale structures. The objective of the work
reported here has been to assess the applicability of this technique to implement non-contact
measurements of multiple mechanical parameters, particularly in plate-like samples. Parameters
of interest may include: layer thickness; layer modulus, Poisson ratio and density.
in the context of the characterisation of microscale structures. The objective of the work
reported here has been to assess the applicability of this technique to implement non-contact
measurements of multiple mechanical parameters, particularly in plate-like samples. Parameters
of interest may include: layer thickness; layer modulus, Poisson ratio and density.
Original language | English |
---|---|
Publication status | Published - Dec 2011 |
Event | 1st EOS Topical Meeting on Micro- and Nano-Optoelectronic Systems - Bremen, Germany Duration: 7 Dec 2011 → 9 Dec 2011 |
Conference
Conference | 1st EOS Topical Meeting on Micro- and Nano-Optoelectronic Systems |
---|---|
Country/Territory | Germany |
City | Bremen |
Period | 7/12/11 → 9/12/11 |
Keywords
- probing
- ultrasound
- lasers
- micro world
- observations
- impressions
- microscale structures
- non-contact measurements
- multiple mechanical parameters
- plate-like samples
- layer thickness
- poisson ratio and density
- layer modulus