Abstract
We investigate the degradation of the magnetic moment of a 300 nm thick FePt film induced by Focused Ion Beam (FIB) milling. A 1 μm × 8 μm rod is milled out of a film by a FIB process and is attached to a cantilever by electron beam induced deposition. Its magnetic moment is determined by frequency-shift cantilever magnetometry. We find that the magnetic moment of the rod is μ = 1.1 ± 0.1 × 10-12 Am2, which implies that 70% of the magnetic moment is preserved during the FIB milling process. This result has important implications for atom trapping and magnetic resonance force microscopy, which are addressed in this paper.
| Original language | English |
|---|---|
| Article number | 072402 |
| Number of pages | 4 |
| Journal | Applied Physics Letters |
| Volume | 107 |
| Issue number | 7 |
| DOIs | |
| Publication status | Published - 19 Aug 2015 |
Keywords
- superconducting quantum interference device
- electrical properties and parameters
- electromagnetism
- plasma processing
- focused ion beam
- electron beam-induced deposition
- magnetic materials
- photolithography
- magnetic resonance force microscopy
- magneto-optical trap