Precision material removal using the electrokinetic phenomenon

C. S. Leo, T. L. Blackburn, Sum Huan Ng, C. Yang, D. L. Butler, Steven Danyluk

Research output: Chapter in Book/Report/Conference proceedingConference contribution book

2 Citations (Scopus)

Abstract

Non-contact material removal processes offer numerous advantages over traditional machining approaches and no where is this more apparent than in the fabrication of micro devices. Current micromachining techniques such as microgrinding and micromilling have limitations with respect to their positioning accuracy and tool deflections. Electro thermal processes such as microEDM and laser machining usually result in a heat affected zone being produced. Other approaches such as etching and non-contact ultraprecision polishing are either costly or are not suitable for high throughput. In order to address these limitations, alternative micromachining techniques are required.
Original languageEnglish
Title of host publicationProceedings of the 23rd Annual Meeting of the American Society for Precision Engineering, ASPE 2008 and the 12th ICPE
Number of pages4
Publication statusPublished - 21 Oct 2008
Externally publishedYes
Event23rd Annual Meeting of the American Society for Precision Engineering, ASPE 2008 and the 12th ICPE - Portland, OR, United States
Duration: 19 Oct 200824 Oct 2008

Conference

Conference23rd Annual Meeting of the American Society for Precision Engineering, ASPE 2008 and the 12th ICPE
CountryUnited States
CityPortland, OR
Period19/10/0824/10/08

Keywords

  • electrokinetics
  • material removal
  • micromachining

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  • Cite this

    Leo, C. S., Blackburn, T. L., Ng, S. H., Yang, C., Butler, D. L., & Danyluk, S. (2008). Precision material removal using the electrokinetic phenomenon. In Proceedings of the 23rd Annual Meeting of the American Society for Precision Engineering, ASPE 2008 and the 12th ICPE