Practical application of direct electron detectors to EBSD mapping in 2D and 3D

K.P. Mingard, M. Stewart, M.G. Gee, S. Vespucci, C. Trager-Cowan

Research output: Contribution to journalArticle

2 Citations (Scopus)

Abstract

The use of a direct electron detector for the simple acquisition of 2D electron backscatter diffraction (EBSD) maps and 3D EBSD datasets with a static sample geometry has been demonstrated in a focused ion beam scanning electron microscope. The small size and flexible connection of the Medipix direct electron detector enabled the mounting of sample and detector on the same stage at the short working distance required for the FIB. Comparison of 3D EBSD datasets acquired by this means and with conventional phosphor based EBSD detectors requiring sample movement showed that the former method with a static sample gave improved slice registration. However, for this sample detector configuration, significant heating by the detector caused sample drift. This drift and ion beam reheating both necessitated the use of fiducial marks to maintain stability during data acquisition.
LanguageEnglish
Pages242-251
Number of pages10
JournalUltramicroscopy
Volume184
Issue numberPart A
Early online date28 Sep 2017
DOIs
Publication statusPublished - 31 Jan 2018

Fingerprint

electron counters
Electron diffraction
Detectors
Electrons
diffraction
electrons
detectors
ion beams
heating
Focused ion beams
mounting
Mountings
Phosphors
Ion beams
phosphors
data acquisition
Data acquisition
acquisition
Electron microscopes
electron microscopes

Keywords

  • EBSD
  • direct electron detector
  • medipix
  • 3D EBSD
  • SEM image drift
  • focused ion beam

Cite this

Mingard, K.P. ; Stewart, M. ; Gee, M.G. ; Vespucci, S. ; Trager-Cowan, C. / Practical application of direct electron detectors to EBSD mapping in 2D and 3D. In: Ultramicroscopy. 2018 ; Vol. 184, No. Part A. pp. 242-251.
@article{1a7f8ca0f95d4e7b83ae733aa56366a9,
title = "Practical application of direct electron detectors to EBSD mapping in 2D and 3D",
abstract = "The use of a direct electron detector for the simple acquisition of 2D electron backscatter diffraction (EBSD) maps and 3D EBSD datasets with a static sample geometry has been demonstrated in a focused ion beam scanning electron microscope. The small size and flexible connection of the Medipix direct electron detector enabled the mounting of sample and detector on the same stage at the short working distance required for the FIB. Comparison of 3D EBSD datasets acquired by this means and with conventional phosphor based EBSD detectors requiring sample movement showed that the former method with a static sample gave improved slice registration. However, for this sample detector configuration, significant heating by the detector caused sample drift. This drift and ion beam reheating both necessitated the use of fiducial marks to maintain stability during data acquisition.",
keywords = "EBSD, direct electron detector, medipix, 3D EBSD, SEM image drift, focused ion beam",
author = "K.P. Mingard and M. Stewart and M.G. Gee and S. Vespucci and C. Trager-Cowan",
year = "2018",
month = "1",
day = "31",
doi = "10.1016/j.ultramic.2017.09.008",
language = "English",
volume = "184",
pages = "242--251",
journal = "Ultramicroscopy",
issn = "0304-3991",
number = "Part A",

}

Practical application of direct electron detectors to EBSD mapping in 2D and 3D. / Mingard, K.P.; Stewart, M.; Gee, M.G.; Vespucci, S.; Trager-Cowan, C.

In: Ultramicroscopy, Vol. 184, No. Part A, 31.01.2018, p. 242-251.

Research output: Contribution to journalArticle

TY - JOUR

T1 - Practical application of direct electron detectors to EBSD mapping in 2D and 3D

AU - Mingard, K.P.

AU - Stewart, M.

AU - Gee, M.G.

AU - Vespucci, S.

AU - Trager-Cowan, C.

PY - 2018/1/31

Y1 - 2018/1/31

N2 - The use of a direct electron detector for the simple acquisition of 2D electron backscatter diffraction (EBSD) maps and 3D EBSD datasets with a static sample geometry has been demonstrated in a focused ion beam scanning electron microscope. The small size and flexible connection of the Medipix direct electron detector enabled the mounting of sample and detector on the same stage at the short working distance required for the FIB. Comparison of 3D EBSD datasets acquired by this means and with conventional phosphor based EBSD detectors requiring sample movement showed that the former method with a static sample gave improved slice registration. However, for this sample detector configuration, significant heating by the detector caused sample drift. This drift and ion beam reheating both necessitated the use of fiducial marks to maintain stability during data acquisition.

AB - The use of a direct electron detector for the simple acquisition of 2D electron backscatter diffraction (EBSD) maps and 3D EBSD datasets with a static sample geometry has been demonstrated in a focused ion beam scanning electron microscope. The small size and flexible connection of the Medipix direct electron detector enabled the mounting of sample and detector on the same stage at the short working distance required for the FIB. Comparison of 3D EBSD datasets acquired by this means and with conventional phosphor based EBSD detectors requiring sample movement showed that the former method with a static sample gave improved slice registration. However, for this sample detector configuration, significant heating by the detector caused sample drift. This drift and ion beam reheating both necessitated the use of fiducial marks to maintain stability during data acquisition.

KW - EBSD

KW - direct electron detector

KW - medipix

KW - 3D EBSD

KW - SEM image drift

KW - focused ion beam

UR - http://www.sciencedirect.com/science/journal/03043991?sdc=1

U2 - 10.1016/j.ultramic.2017.09.008

DO - 10.1016/j.ultramic.2017.09.008

M3 - Article

VL - 184

SP - 242

EP - 251

JO - Ultramicroscopy

T2 - Ultramicroscopy

JF - Ultramicroscopy

SN - 0304-3991

IS - Part A

ER -